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• W65851528 abstract "This Letter presents simulation, fabrication and testing of a high-performance quad-beam silicon piezoresistive accelerometer with very low cross-axis sensitivity. Cross-axis sensitivity in piezoresistive accelerometers is an important issue particularly for high-performance applications. In the present Letter, low cross-axis sensitivity is achieved by improving the device stability by placing four flexures in line with the proof mass edges. The accelerometer device is realised in a single-step double-sided bulk micromachining technique using a 5% dual-doped tetra methyl ammonium hydroxide solution as an anisotropic etchant. Test results of four fabricated devices show an average prime-axis sensitivity of 559.5 µV/g/5 V, a maximum cross-axis sensitivity of 0.62% full scale (FS acceleration=13 g) of the prime-axis sensitivity and nonlinearity at a level of 0.5% of FS which are comparatively better than already reported devices and commercially available piezoresistive sensors." @default.
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• W65851528 date "2012-01-01" @default.
• W65851528 modified "2023-10-18" @default.
• W65851528 title "Realisation of silicon piezoresistive accelerometer with proof mass-edge-aligned-flexures using wet anisotropic etching" @default.
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• W65851528 doi "https://doi.org/10.1049/mnl.2011.0717" @default.
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