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- W6789974 endingPage "351" @default.
- W6789974 startingPage "349" @default.
- W6789974 abstract "Some history of ion implantation technology and applications is given from the perspective of Hughes Research Laboratories and the author. Some alternative approaches are noted from the R&D perspective. Versatility and accuracy are emphasized rather than volume and automation. Two areas emphasized are versatile element capability and profilng and ranges." @default.
- W6789974 created "2016-06-24" @default.
- W6789974 creator A5023980645 @default.
- W6789974 date "1993-01-01" @default.
- W6789974 modified "2023-09-26" @default.
- W6789974 title "One historical perspective of ion implantation technology" @default.
- W6789974 cites W2020496974 @default.
- W6789974 cites W2020552157 @default.
- W6789974 cites W2022544994 @default.
- W6789974 cites W2024527267 @default.
- W6789974 cites W2032875961 @default.
- W6789974 cites W2034270026 @default.
- W6789974 cites W2046220355 @default.
- W6789974 cites W2069869320 @default.
- W6789974 doi "https://doi.org/10.1016/b978-0-444-89994-1.50075-2" @default.
- W6789974 hasPublicationYear "1993" @default.
- W6789974 type Work @default.
- W6789974 sameAs 6789974 @default.
- W6789974 citedByCount "0" @default.
- W6789974 crossrefType "book-chapter" @default.
- W6789974 hasAuthorship W6789974A5023980645 @default.
- W6789974 hasConcept C121332964 @default.
- W6789974 hasConcept C12713177 @default.
- W6789974 hasConcept C145148216 @default.
- W6789974 hasConcept C154945302 @default.
- W6789974 hasConcept C192562407 @default.
- W6789974 hasConcept C41008148 @default.
- W6789974 hasConcept C41823505 @default.
- W6789974 hasConcept C62520636 @default.
- W6789974 hasConceptScore W6789974C121332964 @default.
- W6789974 hasConceptScore W6789974C12713177 @default.
- W6789974 hasConceptScore W6789974C145148216 @default.
- W6789974 hasConceptScore W6789974C154945302 @default.
- W6789974 hasConceptScore W6789974C192562407 @default.
- W6789974 hasConceptScore W6789974C41008148 @default.
- W6789974 hasConceptScore W6789974C41823505 @default.
- W6789974 hasConceptScore W6789974C62520636 @default.
- W6789974 hasLocation W67899741 @default.
- W6789974 hasOpenAccess W6789974 @default.
- W6789974 hasPrimaryLocation W67899741 @default.
- W6789974 hasRelatedWork W1929630845 @default.
- W6789974 hasRelatedWork W2007350853 @default.
- W6789974 hasRelatedWork W2061992016 @default.
- W6789974 hasRelatedWork W2075494096 @default.
- W6789974 hasRelatedWork W2084883795 @default.
- W6789974 hasRelatedWork W2094452592 @default.
- W6789974 hasRelatedWork W2096011054 @default.
- W6789974 hasRelatedWork W2793289113 @default.
- W6789974 hasRelatedWork W3038955141 @default.
- W6789974 hasRelatedWork W4292018273 @default.
- W6789974 isParatext "false" @default.
- W6789974 isRetracted "false" @default.
- W6789974 magId "6789974" @default.
- W6789974 workType "book-chapter" @default.