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• W68856560 abstract "扔的精力在有离子轰炸的电影生长期间，在表面单层和内在的体积上相关到原子排水量，被一个简化离子固体相互作用模型在二进制碰撞下面计算了近似。分开的损坏精力由 Ar 离子引起了，为表面和体积不同，在标准碰撞十字节和明确的表面和钛氮化物(锡) 的体积原子排水量阀值精力下面被决定了。最佳精力范围证明为锡(111 ) 的 Ar+around 110 eV 和为锡(200 ) 的 80 eV 的事件精力有效地在表面上提高广告原子的活动性，但是在内在的体积排除损坏。理论预言和试验性的结果在在低精力离子的好同意是帮助横梁的免职。" @default.
• W68856560 created "2016-06-24" @default.
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• W68856560 date "2006-01-01" @default.
• W68856560 modified "2023-09-23" @default.
• W68856560 title "Optimization of Energy Scope for Titanium Nitride Films Grown by Ion Beam-Assisted Deposition" @default.
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