FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W69080736> ?p ?o ?g. }

• W69080736 abstract "In this paper, we present a simple yet effective surface treatment technique using a UV-enhanced electrode-less wetetching to reduce roughness as well as surface leakage paths in ICP-etched III-N devices. The surface treatment in this study utilizes an aqueous solution with potassium hydroxide (KOH) as the etchant, catalyzed with a UV-light illumination. To study optimal conditions of the surface treatment, bi-level design of experiments were studied and an optimal etching conduction was found to achieve a reduction of the leakage current in III-N p-n junctions by at least one order of magnitude. To develop a suitable fabrication processing for III-N PN junction, in this study, we used an ICP dry etching for p- and nlayer mesa etching. The n-type surface is then treated in a UVassisted wet etching treatment to remove only a few mono-layers of III-N surface atoms and to improve leakage current characteristics. In contrast to conventional PEC etching, we used the potassium persulphate (K2S2O8) as the oxidant to lift the need for electrodes in the UV-assisted surface treatment step. To achieve a smooth surface morphology with reduced high-filed leakage current, a set of design of experiments was conducted by studying the correlation between UV illumination power, KOH concentration, and the K2S2O8 concentration. The results showed that, through this new surface treatment technique, we were able to achieve an improvement of surface morphology by > 75% and at least 10-times lower leakage current on GaN PIN diodes. The electrode-less UV-enhanced surface technique may provide a simple yet effective way to fabricate low-leakage III-N devices." @default.
• W69080736 created "2016-06-24" @default.
• W69080736 creator A5011831545 @default.
• W69080736 creator A5023874610 @default.
• W69080736 creator A5032597406 @default.
• W69080736 creator A5037158638 @default.
• W69080736 date "2008-01-01" @default.
• W69080736 modified "2023-09-27" @default.
• W69080736 title "A Surface Treatment Technique for III-N Device Fabrication" @default.
• W69080736 cites W1660116595 @default.
• W69080736 cites W1980136047 @default.
• W69080736 cites W2039301608 @default.
• W69080736 cites W2069328887 @default.
• W69080736 cites W2112368483 @default.
• W69080736 cites W2115374296 @default.
• W69080736 cites W2130699971 @default.
• W69080736 cites W2142736554 @default.
• W69080736 cites W2782913093 @default.
• W69080736 cites W67974928 @default.
• W69080736 hasPublicationYear "2008" @default.
• W69080736 type Work @default.
• W69080736 sameAs 69080736 @default.
• W69080736 citedByCount "1" @default.
• W69080736 crossrefType "journal-article" @default.
• W69080736 hasAuthorship W69080736A5011831545 @default.
• W69080736 hasAuthorship W69080736A5023874610 @default.
• W69080736 hasAuthorship W69080736A5032597406 @default.
• W69080736 hasAuthorship W69080736A5037158638 @default.
• W69080736 hasConcept C100460472 @default.
• W69080736 hasConcept C107365816 @default.
• W69080736 hasConcept C113196181 @default.
• W69080736 hasConcept C136525101 @default.
• W69080736 hasConcept C139719470 @default.
• W69080736 hasConcept C142724271 @default.
• W69080736 hasConcept C147789679 @default.
• W69080736 hasConcept C159985019 @default.
• W69080736 hasConcept C162324750 @default.
• W69080736 hasConcept C171250308 @default.
• W69080736 hasConcept C17525397 @default.
• W69080736 hasConcept C178790620 @default.
• W69080736 hasConcept C184651966 @default.
• W69080736 hasConcept C185592680 @default.
• W69080736 hasConcept C192562407 @default.
• W69080736 hasConcept C204787440 @default.
• W69080736 hasConcept C2777042071 @default.
• W69080736 hasConcept C2779227376 @default.
• W69080736 hasConcept C2779439175 @default.
• W69080736 hasConcept C43617362 @default.
• W69080736 hasConcept C49040817 @default.
• W69080736 hasConcept C71039073 @default.
• W69080736 hasConcept C71924100 @default.
• W69080736 hasConcept C78434282 @default.
• W69080736 hasConceptScore W69080736C100460472 @default.
• W69080736 hasConceptScore W69080736C107365816 @default.
• W69080736 hasConceptScore W69080736C113196181 @default.
• W69080736 hasConceptScore W69080736C136525101 @default.
• W69080736 hasConceptScore W69080736C139719470 @default.
• W69080736 hasConceptScore W69080736C142724271 @default.
• W69080736 hasConceptScore W69080736C147789679 @default.
• W69080736 hasConceptScore W69080736C159985019 @default.
• W69080736 hasConceptScore W69080736C162324750 @default.
• W69080736 hasConceptScore W69080736C171250308 @default.
• W69080736 hasConceptScore W69080736C17525397 @default.
• W69080736 hasConceptScore W69080736C178790620 @default.
• W69080736 hasConceptScore W69080736C184651966 @default.
• W69080736 hasConceptScore W69080736C185592680 @default.
• W69080736 hasConceptScore W69080736C192562407 @default.
• W69080736 hasConceptScore W69080736C204787440 @default.
• W69080736 hasConceptScore W69080736C2777042071 @default.
• W69080736 hasConceptScore W69080736C2779227376 @default.
• W69080736 hasConceptScore W69080736C2779439175 @default.
• W69080736 hasConceptScore W69080736C43617362 @default.
• W69080736 hasConceptScore W69080736C49040817 @default.
• W69080736 hasConceptScore W69080736C71039073 @default.
• W69080736 hasConceptScore W69080736C71924100 @default.
• W69080736 hasConceptScore W69080736C78434282 @default.
• W69080736 hasLocation W690807361 @default.
• W69080736 hasOpenAccess W69080736 @default.
• W69080736 hasPrimaryLocation W690807361 @default.
• W69080736 hasRelatedWork W1964551820 @default.
• W69080736 hasRelatedWork W1965834868 @default.
• W69080736 hasRelatedWork W1998118698 @default.
• W69080736 hasRelatedWork W2014662115 @default.
• W69080736 hasRelatedWork W2018615188 @default.
• W69080736 hasRelatedWork W2041227889 @default.
• W69080736 hasRelatedWork W2048112558 @default.
• W69080736 hasRelatedWork W2129163213 @default.
• W69080736 hasRelatedWork W2143723658 @default.
• W69080736 hasRelatedWork W2153525165 @default.
• W69080736 hasRelatedWork W2164367606 @default.
• W69080736 hasRelatedWork W2548841679 @default.
• W69080736 hasRelatedWork W2952356670 @default.
• W69080736 hasRelatedWork W2812525093 @default.
• W69080736 hasRelatedWork W2866010898 @default.
• W69080736 hasRelatedWork W2878711653 @default.
• W69080736 hasRelatedWork W2882552503 @default.
• W69080736 hasRelatedWork W2932454366 @default.
• W69080736 hasRelatedWork W3140255359 @default.
• W69080736 hasRelatedWork W3147588180 @default.
• W69080736 isParatext "false" @default.

• next