Matches in SemOpenAlex for { <https://semopenalex.org/work/W70776230> ?p ?o ?g. }
- W70776230 endingPage "571" @default.
- W70776230 startingPage "539" @default.
- W70776230 abstract "Feature size reduction introduces significant challenges for surface wafer preparation, control of microcontamination in general, and introduction of reliable methodology to qualify and verify surface cleaning processes. Contaminants at levels that have been acceptable for larger device geometries may become “killer” (that is, yield-reducing) defects in sub-micron devices. Thus, the contaminant concentrations present on device surfaces at the end of each step in the integrated circuit (IC) fabrication process must be minimized. Sources of particle contamination are ubiquitous, and include process equipment, chemicals, personnel, and production processes. Subcritical and supercritical CO 2 cleaning demonstrated attractive results in efficient residue removal. The properties of CO 2 -based fluids allow the use of these mixtures in various applications of IC manufacturing from drying to low-K deposition. Although the initial cost of an elevated pressure CO 2 system is higher than traditional cleaning systems, when the environmental benefits and energy savings overall are considered, the return on investment becomes more attractive. The use of gas-expanded liquids (GXLs) in cleaning applications may further decrease the cost of initial investment without losing the unique properties of elevated pressure fluids." @default.
- W70776230 created "2016-06-24" @default.
- W70776230 creator A5009408151 @default.
- W70776230 creator A5015222297 @default.
- W70776230 date "2007-01-01" @default.
- W70776230 modified "2023-09-23" @default.
- W70776230 title "Elevated Pressure CO2-Based Fluids Containing Polar Co-Solvents for Cleaning in Microelectronic Device Fabrication" @default.
- W70776230 cites W182679757 @default.
- W70776230 cites W1942649092 @default.
- W70776230 cites W1965282809 @default.
- W70776230 cites W1969608150 @default.
- W70776230 cites W1970023744 @default.
- W70776230 cites W1972460154 @default.
- W70776230 cites W1979066277 @default.
- W70776230 cites W1982612244 @default.
- W70776230 cites W1984052330 @default.
- W70776230 cites W1984277026 @default.
- W70776230 cites W1988170380 @default.
- W70776230 cites W1991255622 @default.
- W70776230 cites W1996259366 @default.
- W70776230 cites W1998676024 @default.
- W70776230 cites W1999011017 @default.
- W70776230 cites W2000622167 @default.
- W70776230 cites W2002920015 @default.
- W70776230 cites W2002974391 @default.
- W70776230 cites W2003919450 @default.
- W70776230 cites W2003958460 @default.
- W70776230 cites W2005222867 @default.
- W70776230 cites W2009518031 @default.
- W70776230 cites W2015396849 @default.
- W70776230 cites W2015697561 @default.
- W70776230 cites W2017352645 @default.
- W70776230 cites W2017360568 @default.
- W70776230 cites W2020258300 @default.
- W70776230 cites W2022270174 @default.
- W70776230 cites W2024901572 @default.
- W70776230 cites W2028302606 @default.
- W70776230 cites W2029979242 @default.
- W70776230 cites W2032807304 @default.
- W70776230 cites W2032821943 @default.
- W70776230 cites W2033133460 @default.
- W70776230 cites W2033314842 @default.
- W70776230 cites W2035974690 @default.
- W70776230 cites W2037965840 @default.
- W70776230 cites W2039541049 @default.
- W70776230 cites W2040507186 @default.
- W70776230 cites W2040783071 @default.
- W70776230 cites W2043278958 @default.
- W70776230 cites W2044154400 @default.
- W70776230 cites W2045576629 @default.
- W70776230 cites W2047921062 @default.
- W70776230 cites W2049685850 @default.
- W70776230 cites W2051782581 @default.
- W70776230 cites W2052756405 @default.
- W70776230 cites W2053206578 @default.
- W70776230 cites W2056187247 @default.
- W70776230 cites W2066092648 @default.
- W70776230 cites W2066926329 @default.
- W70776230 cites W2067963670 @default.
- W70776230 cites W2069194324 @default.
- W70776230 cites W2071556905 @default.
- W70776230 cites W2071696659 @default.
- W70776230 cites W2072322092 @default.
- W70776230 cites W2073388910 @default.
- W70776230 cites W2073530628 @default.
- W70776230 cites W2073957517 @default.
- W70776230 cites W2074945657 @default.
- W70776230 cites W2077889114 @default.
- W70776230 cites W2084621134 @default.
- W70776230 cites W2085327127 @default.
- W70776230 cites W2086886240 @default.
- W70776230 cites W2087687622 @default.
- W70776230 cites W2091120933 @default.
- W70776230 cites W2091444879 @default.
- W70776230 cites W2092346700 @default.
- W70776230 cites W2092680403 @default.
- W70776230 cites W2092926841 @default.
- W70776230 cites W2097223578 @default.
- W70776230 cites W2098650818 @default.
- W70776230 cites W2109103784 @default.
- W70776230 cites W2115084158 @default.
- W70776230 cites W2115487025 @default.
- W70776230 cites W2129276109 @default.
- W70776230 cites W2132656669 @default.
- W70776230 cites W2140543066 @default.
- W70776230 cites W2165170041 @default.
- W70776230 cites W2167926647 @default.
- W70776230 cites W2502675310 @default.
- W70776230 cites W4235480548 @default.
- W70776230 cites W1978822885 @default.
- W70776230 cites W2129091411 @default.
- W70776230 doi "https://doi.org/10.1016/b978-044451664-0/50016-4" @default.
- W70776230 hasPublicationYear "2007" @default.
- W70776230 type Work @default.
- W70776230 sameAs 70776230 @default.
- W70776230 citedByCount "1" @default.
- W70776230 countsByYear W707762302015 @default.
- W70776230 crossrefType "book-chapter" @default.