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- W71622018 abstract "A kutatas soran elkeszult harom kulonboző mechanikai felepitesű merőfej konstrukcio es merő elemkent kapacitiv es optikai erzekelőket, valamint pasztazo alagut szenzorokat alkalmaztuk. Mindharom konstrukcio dinamikus viselkedeset előzetesen veges elem szoftver felhasznalasaval elemeztuk. A felhasznalt optikai erzekelőt, amely alkalmas mind az elmozdulas, mind a szogvaltozas meresere hagyomanyos CD/DVD leolvasofejből alakitottuk ki. Elkeszult tovabba egy 1-dimenzionalis es egy 3-dimenzionalis kalibralo berendezes, melyek meresi bizonytalansaga jobb, mint 20 nm. Mikrokontrollerben megvalosithato eljarast dolgoztunk ki, a merőerő okozta deformaciobol szarmazo hibak korrigalasara | During the project three probe heads, with different mechanical constructions had been developed. The dynamic behaviour of all three constructions were analysed using finite element software. The optical sensors capable of measuring both linear and angular displacement where derived from conventional CD/DVD optical heads. Further a 1-dimensional and 3-dimensional calibration system was implemented. Their measuring uncertainty is better then 20 nm. Microcontroller based algorithm was developed for the compensation of the probe deflection, resulting from the measuring force." @default.
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- W71622018 date "2009-01-01" @default.
- W71622018 modified "2023-09-27" @default.
- W71622018 title "A szubmikron méréstechnika egyes érzékelési feladatainak elméleti és kísérleti vizsgálata = Theoretical and experimental investigation of certain sensory tasks in the submicron measuring technique" @default.
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