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Matches in SemOpenAlex for { <https://semopenalex.org/work/W72640513> ?p ?o ?g. }

• W72640513 abstract "We report a very simple method for making Self-Assembled Vertical Comb (SAVC) drive actuators with an SOI wafer by using two photomasks only (for SOI top layer and substrate). The initial angular offset of the movable combs is prepared by using permanent stiction of sacrificially released micropads in association with a leverage mechanism around the torsion bars. The device have shown good performance of over 1.0 deg rotation angle with a typical drive voltage of 20 V without any in-use stictions." @default.
• W72640513 created "2016-06-24" @default.
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• W72640513 date "2004-01-01" @default.
• W72640513 modified "2023-09-27" @default.
• W72640513 title "A Two-mask Process for Self-assembled Vertical Comb Drive Mirrors" @default.
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• W72640513 hasPublicationYear "2004" @default.
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