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- W751541999 abstract "The changes of crystallinity and microstructure and the interfaces of alloys deposited on amorphous were studied as a function of deposition temperature. The crystallinity, microstructure, and compositional uniformity of alloys deposited on the SiOl at different temperature were investigated by X-ray diffraction and transmission electron microscopy. And interface were investigated by high-resolution transmission electron microscopy. The films were deposited on amorphous at and by Si-MBE. In the film deposited at , only amorphous phase were observed. In the film deposited at , both amorphous and polycrystalline films were observed. Both phases were deposited simultaneously, but, at initial film growth, amorphous phase prevailed over polycrystalline phase. As the film thickness increased, the fraction of polycrystalline phase increased. At , thin amorphous layer was observed at lOnm from surface. In the films deposited at higher than , only crystalline phase were observed. Polycrystalline films had columnar structure. Compositional uniformity for deposited films were good regardless of deposition temperature. The interfaces of were flat, whatever polycrystal or amorphous was deposited on ." @default.
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- W751541999 date "1994-01-01" @default.
- W751541999 modified "2023-09-23" @default.
- W751541999 title "A study of the crystallinity and microstructure of the $Si_{1-X}Ge_X$ alloys deposited on the $SiO_2$at various temperatures" @default.
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