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- W753269144 abstract "This paper proposes a controller design method using the evolutionary computation algorithm and the fuzzy logic to control the wafer temperature in rapid thermal processing. First, we design the feedforward static controller to provide the control powers of the lamps for the given steady state temperature. Second, the feedforward dynamic controller is designed for the additional control powers to achieve a given transient response. These feedforward controllers are implemented by using the fuzzy logic to act as a global nonlinear controller over a wide range of operating points. The parameters of these controllers are optimized by using the evolutionary computation algorithm so that it can be used when the mathematical model is not available. In addition, the feedback error controller is introduced to compensate the feedforward controllers when there exist disturbances and modeling errors. The gain of feedback error controller is also obtained by the evolutionary computation algorithm. Through simulations, we verify the proposed control system can give a satisfactory performance." @default.
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- W753269144 date "1998-01-01" @default.
- W753269144 modified "2023-09-24" @default.
- W753269144 title "Design of Controller for Rapid Thermal Process Using Evolutionary Computation Algorithm and Fuzzy Logic" @default.
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