Matches in SemOpenAlex for { <https://semopenalex.org/work/W754441028> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W754441028 endingPage "340" @default.
- W754441028 startingPage "335" @default.
- W754441028 abstract "We investigated the role of the capping layers in the formation of the cobalt silicide in Co/Si systems with TiN and Ti capping layers and without capping layers. The Co/Si interfacial reactions and the phase transformations by the rapid thermal annealing (RTA) processes were observed by sheet resistance measurements, XRD, SIMS and TEM analyses for the clean silicon substrate as well as for the chemically oxidized silicon substrate by . We observed the retardation of the cobalt disilicide formation in the Co/Si system with Ti capping layers. In the case of Co//Si system, cobalt silicide was formed by the Co/Si reaction due to with the dissociation of the oxide layer by the Ti capping layers." @default.
- W754441028 created "2016-06-24" @default.
- W754441028 creator A5001151163 @default.
- W754441028 date "2000-01-01" @default.
- W754441028 modified "2023-09-28" @default.
- W754441028 title "A study on the formation of cobalt silicide thin films in Co/Si systems with different capping layers" @default.
- W754441028 hasPublicationYear "2000" @default.
- W754441028 type Work @default.
- W754441028 sameAs 754441028 @default.
- W754441028 citedByCount "0" @default.
- W754441028 crossrefType "journal-article" @default.
- W754441028 hasAuthorship W754441028A5001151163 @default.
- W754441028 hasConcept C111368507 @default.
- W754441028 hasConcept C127313418 @default.
- W754441028 hasConcept C127413603 @default.
- W754441028 hasConcept C171250308 @default.
- W754441028 hasConcept C185592680 @default.
- W754441028 hasConcept C191897082 @default.
- W754441028 hasConcept C192562407 @default.
- W754441028 hasConcept C199289684 @default.
- W754441028 hasConcept C2777289219 @default.
- W754441028 hasConcept C2777855556 @default.
- W754441028 hasConcept C2779227376 @default.
- W754441028 hasConcept C2780901251 @default.
- W754441028 hasConcept C42360764 @default.
- W754441028 hasConcept C515602321 @default.
- W754441028 hasConcept C525849907 @default.
- W754441028 hasConcept C544956773 @default.
- W754441028 hasConceptScore W754441028C111368507 @default.
- W754441028 hasConceptScore W754441028C127313418 @default.
- W754441028 hasConceptScore W754441028C127413603 @default.
- W754441028 hasConceptScore W754441028C171250308 @default.
- W754441028 hasConceptScore W754441028C185592680 @default.
- W754441028 hasConceptScore W754441028C191897082 @default.
- W754441028 hasConceptScore W754441028C192562407 @default.
- W754441028 hasConceptScore W754441028C199289684 @default.
- W754441028 hasConceptScore W754441028C2777289219 @default.
- W754441028 hasConceptScore W754441028C2777855556 @default.
- W754441028 hasConceptScore W754441028C2779227376 @default.
- W754441028 hasConceptScore W754441028C2780901251 @default.
- W754441028 hasConceptScore W754441028C42360764 @default.
- W754441028 hasConceptScore W754441028C515602321 @default.
- W754441028 hasConceptScore W754441028C525849907 @default.
- W754441028 hasConceptScore W754441028C544956773 @default.
- W754441028 hasIssue "4" @default.
- W754441028 hasLocation W7544410281 @default.
- W754441028 hasOpenAccess W754441028 @default.
- W754441028 hasPrimaryLocation W7544410281 @default.
- W754441028 hasRelatedWork W1611627971 @default.
- W754441028 hasRelatedWork W1657878955 @default.
- W754441028 hasRelatedWork W1963945483 @default.
- W754441028 hasRelatedWork W1975493676 @default.
- W754441028 hasRelatedWork W1987218038 @default.
- W754441028 hasRelatedWork W2002990421 @default.
- W754441028 hasRelatedWork W2020429632 @default.
- W754441028 hasRelatedWork W2024347506 @default.
- W754441028 hasRelatedWork W2027925485 @default.
- W754441028 hasRelatedWork W2050544000 @default.
- W754441028 hasRelatedWork W2055630931 @default.
- W754441028 hasRelatedWork W2055825977 @default.
- W754441028 hasRelatedWork W2072559531 @default.
- W754441028 hasRelatedWork W2087323242 @default.
- W754441028 hasRelatedWork W2162163123 @default.
- W754441028 hasRelatedWork W2319795814 @default.
- W754441028 hasRelatedWork W2327424331 @default.
- W754441028 hasRelatedWork W2732208238 @default.
- W754441028 hasRelatedWork W2765850004 @default.
- W754441028 hasRelatedWork W1976120881 @default.
- W754441028 hasVolume "9" @default.
- W754441028 isParatext "false" @default.
- W754441028 isRetracted "false" @default.
- W754441028 magId "754441028" @default.
- W754441028 workType "article" @default.