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• W756945331 abstract "【We developed a 440MHz surface acoustic wave (SAW) microsensor integrated with pressure-temperature sensors and ID tag. Two piezoelectric substrates were bonded, in which ${sim}150;{mu}m$ cavity was structured. Four sides were completely sealed by JSR photoresist (PR). Pressure sensor was placed on the top substrate, whereas ill tag and temperature sensor were placed on the bottom substrate. Using network analyzer, the developed microsensor was wirelessly tested. Sharp reflection peaks with high S/N ratio, small signal attenuation, and small spurious peaks were observed. All the reflection peaks were well matched with the coupling of mode (COM) simulation results. With a 10mW RF power from the network analyzer, a ${sim}1$ meter readout distance was observed. Eight sharp ON reflection peaks were observed for ID tag. Temperature sensor was characterized from $20^{circ}C$ to $200^{circ}C$ . A large phase shift per unit temperature change was observed. The evaluated sensitivity was ${sim}10^{circ}/^{circ}C$ .】" @default.
• W756945331 created "2016-06-24" @default.
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• W756945331 date "2007-01-01" @default.
• W756945331 modified "2023-09-23" @default.
• W756945331 title "Development of Batteryless SAW-based Integrated Microsensor and Wireless Measurement Technique" @default.
• W756945331 hasPublicationYear "2007" @default.
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