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- W758690218 abstract "Parylene C has been investigated for use as a sacrificial material in microfabrication. Although Parylene C cannot be patterned lithographically like photoresists, it nevertheless extends the range of processing options by offering a set of properties that are suitable for microfabrication and are complementary to those of photoresists. The compatibility of Parylene C with several microfabrication processes was demonstrated in experiments in which a thin film of Parylene C was deposited on a silicon wafer, then several thin metal films were deposited and successfully patterned, utilizing the Parylene C pads as a sacrificial layer. The term parylene -- a contraction of poly(para-xylene) -- denotes a family of vapor-deposited polymers. In Parylene C (the most common form of parylene), a chlorine atom is substituted for one of the hydrogen atoms on the benzene ring of each para-xylene moiety. Heretofore, parylenes have been used as conformal coating materials in diverse applications." @default.
- W758690218 created "2016-06-24" @default.
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- W758690218 date "2005-06-01" @default.
- W758690218 modified "2023-09-27" @default.
- W758690218 title "Parylene C as a Sacrificial Material for Microfabrication" @default.
- W758690218 hasPublicationYear "2005" @default.
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