Matches in SemOpenAlex for { <https://semopenalex.org/work/W75886972> ?p ?o ?g. }
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- W75886972 endingPage "53" @default.
- W75886972 startingPage "49" @default.
- W75886972 abstract "Phosphorus-doped n-type microcrystal1ine SiC:H (μc-SiC:H) thin films with high conductivity and wide optical bandgap have been prepared using the inductively coupled RF plasma chemical vapor deposition method. The obtained film is intended for the emitter of Si heterojunction bipolar transistors. Results from X-ray diffraction and IR absorption measurements show the μc-SiC:H film consists of a mixture of microcrystalline Si:H (μc-Si:H) and amorphous SiC:H (a-SiC:H)." @default.
- W75886972 created "2016-06-24" @default.
- W75886972 creator A5018115010 @default.
- W75886972 creator A5044162753 @default.
- W75886972 creator A5075420892 @default.
- W75886972 date "1989-01-01" @default.
- W75886972 modified "2023-09-24" @default.
- W75886972 title "Preparation of Microcrystalline Silicon Carbide Thin Films for the Emitter of Si HBTs" @default.
- W75886972 cites W1994678147 @default.
- W75886972 cites W2026777622 @default.
- W75886972 cites W2030704750 @default.
- W75886972 doi "https://doi.org/10.1007/978-3-642-75048-9_10" @default.
- W75886972 hasPublicationYear "1989" @default.
- W75886972 type Work @default.
- W75886972 sameAs 75886972 @default.
- W75886972 citedByCount "2" @default.
- W75886972 crossrefType "book-chapter" @default.
- W75886972 hasAuthorship W75886972A5018115010 @default.
- W75886972 hasAuthorship W75886972A5044162753 @default.
- W75886972 hasAuthorship W75886972A5075420892 @default.
- W75886972 hasConcept C159985019 @default.
- W75886972 hasConcept C185592680 @default.
- W75886972 hasConcept C192562407 @default.
- W75886972 hasConcept C201370411 @default.
- W75886972 hasConcept C2780722187 @default.
- W75886972 hasConcept C46918542 @default.
- W75886972 hasConcept C49040817 @default.
- W75886972 hasConcept C8010536 @default.
- W75886972 hasConceptScore W75886972C159985019 @default.
- W75886972 hasConceptScore W75886972C185592680 @default.
- W75886972 hasConceptScore W75886972C192562407 @default.
- W75886972 hasConceptScore W75886972C201370411 @default.
- W75886972 hasConceptScore W75886972C2780722187 @default.
- W75886972 hasConceptScore W75886972C46918542 @default.
- W75886972 hasConceptScore W75886972C49040817 @default.
- W75886972 hasConceptScore W75886972C8010536 @default.
- W75886972 hasLocation W758869721 @default.
- W75886972 hasOpenAccess W75886972 @default.
- W75886972 hasPrimaryLocation W758869721 @default.
- W75886972 hasRelatedWork W1828979328 @default.
- W75886972 hasRelatedWork W1962986681 @default.
- W75886972 hasRelatedWork W2009024500 @default.
- W75886972 hasRelatedWork W2056523615 @default.
- W75886972 hasRelatedWork W2137755700 @default.
- W75886972 hasRelatedWork W2903708913 @default.
- W75886972 hasRelatedWork W2913277734 @default.
- W75886972 hasRelatedWork W3197262867 @default.
- W75886972 hasRelatedWork W75886972 @default.
- W75886972 hasRelatedWork W3148809432 @default.
- W75886972 isParatext "false" @default.
- W75886972 isRetracted "false" @default.
- W75886972 magId "75886972" @default.
- W75886972 workType "book-chapter" @default.