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- W760432888 startingPage "141" @default.
- W760432888 abstract "MEMS 공정기법을 적용하여 새로운 형태의 LC 공진기형 자기센서를 제작하였다. 이 마이크로 LC 공진기는 솔레노이드형 마이크로인덕터에 연자성 마이크로와이어를 코어로 삽입하고 여기에 콘덴서를 병렬로 연결하여 구성하였다. 코어 자성 물질은 melt spinning 법으로 제조한 유리가 코팅된 <TEX>$Co_{83.2}B_{3.3}Si_{5.9}Mn_{7.6}$</TEX> 마이크로와이어이다. 코어물질의 연자성을 개선하기 위하여 <TEX>$150^{circ}C$</TEX>, <TEX>$200^{circ}C,;250^{circ}C,;300^{circ}C$</TEX> 등 여러 온도에서 1시간씩 진공 열처리하였다. MEMS 공정으로 제작된 솔레노이형 마이크로인덕터는 길이가 <TEX>$500{sim}1,000{mu}m$</TEX> 이며 감은수는 <TEX>$10{sim}20$</TEX>회이다. 외부자기장에 따른 본 마이크로인덕터의 최대 인덕턴스 변화율은 370%이었다. 초연자성 마이크로와이어의 투자율이 외부자기장에 따라 급격히 변하기 때문에 인덕턴스변화율이나 LC 공진기의 자기임피던스 변화율(MIR)이 급속하게 변한다. 최대감도를 얻기 위해서 MIR 곡선은 정교하게 조절할 수 있다. 마이크로인덕터와 멀티바이브 레어터 회로로 구성된 원형 자기센서소자를 제작하여 시험동작을 하는데 성공하였다. A new class of LC-resonator for micro magnetic sensor device was invented and fabricated by means of MEMS technique. The micro LC-resonator consists of a solenoidal micro-inductor with a bundle of soft magnetic microwire cores and a capacitor connected in parallel to the micro-inductor. The core magnetic material is a tiny glass coated <TEX>$Co_{83.2}B_{3.3}Si_{5.9}Mn_{7.6}$</TEX> microwire fabricated by a glasscoated melt spinning technique. The core materials were annealed at various temperatures <TEX>$150^{circ}C,;200^{circ}C;,250^{circ}C;,$</TEX> and <TEX>$300^{circ}C$</TEX> for 1 hour in a vacuum to improve soft magnetic properties. The solenoidal micro-inductors fabricated by MEMS technique were <TEX>$500{sim}1,000{mu}m$</TEX> in length with <TEX>$10{sim}20$</TEX> turns. The changes of inductance as a function of external magnetic field in micro-inductors with properly annealed microwire cores were varied as much as 370%. Since the permeability of ultra soft magnetic microwire is changing rapidly as a function of external magnetic field. The inductance ratio as well as magnetoimpedance ratio (MIR) in a LC-resonator was varied drastically as a function of external magnetic field. The MIR curves can be tuned very precisely to obtain maximum sensitivity. A prototype magnetic sensor device consisting of the developed microinductors with a multivibrator circuit was test successfully." @default.
- W760432888 created "2016-06-24" @default.
- W760432888 date "2007-06-30" @default.
- W760432888 modified "2023-09-26" @default.
- W760432888 title "A New LC Resonator Fabricated by MEMS Technique and its Application to Magnetic Sensor Device" @default.
- W760432888 cites W1489928897 @default.
- W760432888 cites W1998270849 @default.
- W760432888 doi "https://doi.org/10.4283/jkms.2007.17.3.141" @default.
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