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- W76362156 abstract "This overview is not intended as yet another contribution to existing reviews on the physics of sputtering and its history. In this respect, the interested reader is referred to the excellent recent monographs and conference proceedings given in Ref.1 to 5. The intention of this article is to give an introduction to physical sputtering, guided by the interplay between collisional and “thermal” sputtering which has obscured the understanding of the phenomenon since its discovery. It will become apparent that angular distributions of sputtered particles have always played a decisive role in identifying the relevant mechanisms, energy distributions have allowed quantifying them, and mass distributions now urge further efforts towards understanding collective processes." @default.
- W76362156 created "2016-06-24" @default.
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- W76362156 date "1986-01-01" @default.
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- W76362156 title "Physical Sputtering of Elemental Metals and Semiconductors" @default.
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- W76362156 doi "https://doi.org/10.1007/978-94-009-4422-0_1" @default.
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