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- W76484612 abstract "This Final Report describes the preparation and characterization of amorphous fluorohydrogenated silicon thin films. The novel approach in this study lies in the use of fluorinated silanes as film precursors. The advantages of this method are well defined initial ratios of hydrogen and fluorine to silicon and greatly reduced hazards in the handling of the gas. Fluorine derivatives of both silane and disilane were synthesized. Both glow discharge (or plasma-enhanced CVD) and thermal (CVD) methods were employed to prepare amorphous silicon on glass and silicon wafers. The electrical characterization of the material prepared from difluorosilane showed that the a-Si:H:F films obtained are of solar-grade semiconductor quality and can be doped to p- and n-type materials with diborane and phosphine. 29 refs., 24 figs., 10 tabs." @default.
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- W76484612 date "1988-09-01" @default.
- W76484612 modified "2023-09-27" @default.
- W76484612 title "Novel silane and disilane precursors to amorphous semiconductors: Final subcontract report, May 1988" @default.
- W76484612 hasPublicationYear "1988" @default.
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