Matches in SemOpenAlex for { <https://semopenalex.org/work/W765497159> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W765497159 endingPage "180" @default.
- W765497159 startingPage "175" @default.
- W765497159 abstract "The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. In this research, fabrication of micro plasma electrode was carried out using FIB. The one of problems of FIB-sputtering is the redeposition of material including Ga+ ion source during sputtering process. Therefore the effect of the redeposition was verified by EDX. And the micro plasma electrode of copper was fabricated by FIB." @default.
- W765497159 created "2016-06-24" @default.
- W765497159 creator A5026770943 @default.
- W765497159 creator A5043105828 @default.
- W765497159 creator A5073006536 @default.
- W765497159 creator A5081331418 @default.
- W765497159 date "2005-01-01" @default.
- W765497159 modified "2023-09-26" @default.
- W765497159 title "Development of Micro Plasma Electrode using Focused Ion Beam" @default.
- W765497159 hasPublicationYear "2005" @default.
- W765497159 type Work @default.
- W765497159 sameAs 765497159 @default.
- W765497159 citedByCount "0" @default.
- W765497159 crossrefType "journal-article" @default.
- W765497159 hasAuthorship W765497159A5026770943 @default.
- W765497159 hasAuthorship W765497159A5043105828 @default.
- W765497159 hasAuthorship W765497159A5073006536 @default.
- W765497159 hasAuthorship W765497159A5081331418 @default.
- W765497159 hasConcept C105487726 @default.
- W765497159 hasConcept C121332964 @default.
- W765497159 hasConcept C136525101 @default.
- W765497159 hasConcept C142724271 @default.
- W765497159 hasConcept C145148216 @default.
- W765497159 hasConcept C147789679 @default.
- W765497159 hasConcept C159985019 @default.
- W765497159 hasConcept C161866238 @default.
- W765497159 hasConcept C171250308 @default.
- W765497159 hasConcept C17525397 @default.
- W765497159 hasConcept C178790620 @default.
- W765497159 hasConcept C185592680 @default.
- W765497159 hasConcept C19067145 @default.
- W765497159 hasConcept C191897082 @default.
- W765497159 hasConcept C192562407 @default.
- W765497159 hasConcept C204787440 @default.
- W765497159 hasConcept C22423302 @default.
- W765497159 hasConcept C2780357685 @default.
- W765497159 hasConcept C50774322 @default.
- W765497159 hasConcept C523214423 @default.
- W765497159 hasConcept C62520636 @default.
- W765497159 hasConcept C71924100 @default.
- W765497159 hasConcept C82706917 @default.
- W765497159 hasConceptScore W765497159C105487726 @default.
- W765497159 hasConceptScore W765497159C121332964 @default.
- W765497159 hasConceptScore W765497159C136525101 @default.
- W765497159 hasConceptScore W765497159C142724271 @default.
- W765497159 hasConceptScore W765497159C145148216 @default.
- W765497159 hasConceptScore W765497159C147789679 @default.
- W765497159 hasConceptScore W765497159C159985019 @default.
- W765497159 hasConceptScore W765497159C161866238 @default.
- W765497159 hasConceptScore W765497159C171250308 @default.
- W765497159 hasConceptScore W765497159C17525397 @default.
- W765497159 hasConceptScore W765497159C178790620 @default.
- W765497159 hasConceptScore W765497159C185592680 @default.
- W765497159 hasConceptScore W765497159C19067145 @default.
- W765497159 hasConceptScore W765497159C191897082 @default.
- W765497159 hasConceptScore W765497159C192562407 @default.
- W765497159 hasConceptScore W765497159C204787440 @default.
- W765497159 hasConceptScore W765497159C22423302 @default.
- W765497159 hasConceptScore W765497159C2780357685 @default.
- W765497159 hasConceptScore W765497159C50774322 @default.
- W765497159 hasConceptScore W765497159C523214423 @default.
- W765497159 hasConceptScore W765497159C62520636 @default.
- W765497159 hasConceptScore W765497159C71924100 @default.
- W765497159 hasConceptScore W765497159C82706917 @default.
- W765497159 hasIssue "5" @default.
- W765497159 hasLocation W7654971591 @default.
- W765497159 hasOpenAccess W765497159 @default.
- W765497159 hasPrimaryLocation W7654971591 @default.
- W765497159 hasRelatedWork W1526313967 @default.
- W765497159 hasRelatedWork W1600518635 @default.
- W765497159 hasRelatedWork W1995206819 @default.
- W765497159 hasRelatedWork W2052399168 @default.
- W765497159 hasRelatedWork W2092417883 @default.
- W765497159 hasRelatedWork W2114912773 @default.
- W765497159 hasRelatedWork W2129736526 @default.
- W765497159 hasRelatedWork W220843860 @default.
- W765497159 hasRelatedWork W2210370127 @default.
- W765497159 hasRelatedWork W2334992770 @default.
- W765497159 hasRelatedWork W2393647850 @default.
- W765497159 hasRelatedWork W2477584525 @default.
- W765497159 hasRelatedWork W2478352053 @default.
- W765497159 hasRelatedWork W2488456525 @default.
- W765497159 hasRelatedWork W2534296196 @default.
- W765497159 hasRelatedWork W2914366762 @default.
- W765497159 hasRelatedWork W3007000154 @default.
- W765497159 hasRelatedWork W3027160494 @default.
- W765497159 hasRelatedWork W580535425 @default.
- W765497159 hasRelatedWork W61684133 @default.
- W765497159 hasVolume "22" @default.
- W765497159 isParatext "false" @default.
- W765497159 isRetracted "false" @default.
- W765497159 magId "765497159" @default.
- W765497159 workType "article" @default.