Matches in SemOpenAlex for { <https://semopenalex.org/work/W76672352> ?p ?o ?g. }
- W76672352 endingPage "524" @default.
- W76672352 startingPage "443" @default.
- W76672352 abstract "As great progress has been achieved in micro-fabrication and micro-processing technologies, the size of electronic devices has been scaled down to submicrometers. This is especially embodied in the Si metal-oxide-semiconductor (MOS)-based devices, e.g., chips and memories, obeying the well known Moore’s law, with the number of transistors on an integrated circuit doubling approximately every two years. To minimize the short-channel effect, the thickness of dielectric oxide in a MOS device is approaching a few nanometers (Stathis and DiMaria, 1999; Frank et al., 2001). In recent years, some basic functional components of many microelectronic devices, such as dielectric oxides in a MOS device, have been scaled down to the nanoscale in one or more dimensions." @default.
- W76672352 created "2016-06-24" @default.
- W76672352 creator A5075523709 @default.
- W76672352 date "2013-01-01" @default.
- W76672352 modified "2023-09-27" @default.
- W76672352 title "Dielectric Breakdown of Microelectronic and Nanoelectronic Devices" @default.
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