Matches in SemOpenAlex for { <https://semopenalex.org/work/W770970873> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W770970873 abstract "Collection of linewidth data is an important part of photo resist characterization. Linewidth data are usually col lected by optical measurements or scanning electron micros copy. Both of these techniques are tedious and timeconsuming. In this work, electrically measurable test structures are used to collect linewidth data. These structures use a measured sheet resistance, a known length of conducting material, and the measured resistance of the structure to determine the linewidth. The benefits of using these structures include completely automated data collec tion and the ability to collect statistically significant amounts of data. This allows the use of existing statisti cal analysis software to analyze and fit a model to the data. In this study, electrically testable linewidth structures are used in two photoresist characterization experiments to provide important process latitude informa tion. The measured linewidth includes the effects of the photolithography and the subsequent etching step." @default.
- W770970873 created "2016-06-24" @default.
- W770970873 creator A5037791951 @default.
- W770970873 date "1985-01-01" @default.
- W770970873 modified "2023-09-26" @default.
- W770970873 title "Determining process latitude with electrically measurable test structures" @default.
- W770970873 cites W1994212431 @default.
- W770970873 cites W1999743588 @default.
- W770970873 cites W2017209251 @default.
- W770970873 cites W2085930721 @default.
- W770970873 cites W2112528275 @default.
- W770970873 cites W2142081503 @default.
- W770970873 cites W2144123342 @default.
- W770970873 hasPublicationYear "1985" @default.
- W770970873 type Work @default.
- W770970873 sameAs 770970873 @default.
- W770970873 citedByCount "0" @default.
- W770970873 crossrefType "journal-article" @default.
- W770970873 hasAuthorship W770970873A5037791951 @default.
- W770970873 hasConcept C100460472 @default.
- W770970873 hasConcept C105487726 @default.
- W770970873 hasConcept C111919701 @default.
- W770970873 hasConcept C120665830 @default.
- W770970873 hasConcept C121332964 @default.
- W770970873 hasConcept C134406635 @default.
- W770970873 hasConcept C142181693 @default.
- W770970873 hasConcept C16910744 @default.
- W770970873 hasConcept C171250308 @default.
- W770970873 hasConcept C192562407 @default.
- W770970873 hasConcept C199360897 @default.
- W770970873 hasConcept C2779227376 @default.
- W770970873 hasConcept C2780841128 @default.
- W770970873 hasConcept C41008148 @default.
- W770970873 hasConcept C49040817 @default.
- W770970873 hasConcept C520434653 @default.
- W770970873 hasConcept C53524968 @default.
- W770970873 hasConcept C98045186 @default.
- W770970873 hasConceptScore W770970873C100460472 @default.
- W770970873 hasConceptScore W770970873C105487726 @default.
- W770970873 hasConceptScore W770970873C111919701 @default.
- W770970873 hasConceptScore W770970873C120665830 @default.
- W770970873 hasConceptScore W770970873C121332964 @default.
- W770970873 hasConceptScore W770970873C134406635 @default.
- W770970873 hasConceptScore W770970873C142181693 @default.
- W770970873 hasConceptScore W770970873C16910744 @default.
- W770970873 hasConceptScore W770970873C171250308 @default.
- W770970873 hasConceptScore W770970873C192562407 @default.
- W770970873 hasConceptScore W770970873C199360897 @default.
- W770970873 hasConceptScore W770970873C2779227376 @default.
- W770970873 hasConceptScore W770970873C2780841128 @default.
- W770970873 hasConceptScore W770970873C41008148 @default.
- W770970873 hasConceptScore W770970873C49040817 @default.
- W770970873 hasConceptScore W770970873C520434653 @default.
- W770970873 hasConceptScore W770970873C53524968 @default.
- W770970873 hasConceptScore W770970873C98045186 @default.
- W770970873 hasLocation W7709708731 @default.
- W770970873 hasOpenAccess W770970873 @default.
- W770970873 hasPrimaryLocation W7709708731 @default.
- W770970873 hasRelatedWork W1541781922 @default.
- W770970873 hasRelatedWork W1877884921 @default.
- W770970873 hasRelatedWork W1997140434 @default.
- W770970873 hasRelatedWork W2001968554 @default.
- W770970873 hasRelatedWork W2003962481 @default.
- W770970873 hasRelatedWork W2010724983 @default.
- W770970873 hasRelatedWork W2019732223 @default.
- W770970873 hasRelatedWork W2026384529 @default.
- W770970873 hasRelatedWork W2028232824 @default.
- W770970873 hasRelatedWork W2030643489 @default.
- W770970873 hasRelatedWork W2044460702 @default.
- W770970873 hasRelatedWork W2053039627 @default.
- W770970873 hasRelatedWork W2062181152 @default.
- W770970873 hasRelatedWork W2075335303 @default.
- W770970873 hasRelatedWork W2095128726 @default.
- W770970873 hasRelatedWork W2098854302 @default.
- W770970873 hasRelatedWork W2106616312 @default.
- W770970873 hasRelatedWork W2112601744 @default.
- W770970873 hasRelatedWork W2155246362 @default.
- W770970873 hasRelatedWork W2793622715 @default.
- W770970873 isParatext "false" @default.
- W770970873 isRetracted "false" @default.
- W770970873 magId "770970873" @default.
- W770970873 workType "article" @default.