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- W772004513 abstract "The variations of dielectric properties of continuous composition spread thin films prepared by off-axis radio-frequency magnetron sputtering were investigated. The dielectric maps of dielectric constant and loss were plotted via 1500 micron-step measuring. The specific points showing superior dielectric properties of high dielectric constant (k~19.5) and loss (tan side in sized Pt/Ti//Si(100) substrates." @default.
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- W772004513 date "2010-01-01" @default.
- W772004513 modified "2023-09-24" @default.
- W772004513 title "Dielectric Properties of $Ta_2O_5-SiO_2$ Thin Films Deposited at Room Temperature by Continuous Composition Spread" @default.
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