Matches in SemOpenAlex for { <https://semopenalex.org/work/W777728635> ?p ?o ?g. }
Showing items 1 to 81 of
81
with 100 items per page.
- W777728635 endingPage "163" @default.
- W777728635 startingPage "154" @default.
- W777728635 abstract "Process monitoring of output variables affecting final performance have been mainly executed in semiconductor manufacturing process. However, even earlier detection of causes of output variation cannot completely prevent yield loss because a number of wafers after detecting them must be re-processed or cast away. Semiconductor manufacturers have put more attention toward monitoring process inputs to prevent yield loss by early detecting change-point of the process. In the paper, we propose the method to efficiently monitor functional input variables in multi-phase semiconductor manufacturing process. Measured input variables in the multi-phase process tend to be of functional structured form. After data pre-processing for these functional input data, change-point analysis is practiced to the pre-processed data set. If process variation occurs, key variables affecting process variation are selected using contribution plot for monitoring efficiency. To evaluate the propriety of proposed monitoring method, we used real data set in semiconductor manufacturing process. The experiment shows that the proposed method has better performance than previous output monitoring method in terms of fault detection and process monitoring." @default.
- W777728635 created "2016-06-24" @default.
- W777728635 creator A5003553150 @default.
- W777728635 creator A5073430698 @default.
- W777728635 date "2010-01-01" @default.
- W777728635 modified "2023-09-23" @default.
- W777728635 title "A Monitoring System for Functional Input Data in Multi-phase Semiconductor Manufacturing Process" @default.
- W777728635 hasPublicationYear "2010" @default.
- W777728635 type Work @default.
- W777728635 sameAs 777728635 @default.
- W777728635 citedByCount "0" @default.
- W777728635 crossrefType "journal-article" @default.
- W777728635 hasAuthorship W777728635A5003553150 @default.
- W777728635 hasAuthorship W777728635A5073430698 @default.
- W777728635 hasConcept C111919701 @default.
- W777728635 hasConcept C119599485 @default.
- W777728635 hasConcept C127413603 @default.
- W777728635 hasConcept C152745839 @default.
- W777728635 hasConcept C154945302 @default.
- W777728635 hasConcept C160671074 @default.
- W777728635 hasConcept C172707124 @default.
- W777728635 hasConcept C177264268 @default.
- W777728635 hasConcept C199360897 @default.
- W777728635 hasConcept C200601418 @default.
- W777728635 hasConcept C2524010 @default.
- W777728635 hasConcept C28719098 @default.
- W777728635 hasConcept C33923547 @default.
- W777728635 hasConcept C41008148 @default.
- W777728635 hasConcept C66018809 @default.
- W777728635 hasConcept C79403827 @default.
- W777728635 hasConcept C93389723 @default.
- W777728635 hasConcept C98045186 @default.
- W777728635 hasConceptScore W777728635C111919701 @default.
- W777728635 hasConceptScore W777728635C119599485 @default.
- W777728635 hasConceptScore W777728635C127413603 @default.
- W777728635 hasConceptScore W777728635C152745839 @default.
- W777728635 hasConceptScore W777728635C154945302 @default.
- W777728635 hasConceptScore W777728635C160671074 @default.
- W777728635 hasConceptScore W777728635C172707124 @default.
- W777728635 hasConceptScore W777728635C177264268 @default.
- W777728635 hasConceptScore W777728635C199360897 @default.
- W777728635 hasConceptScore W777728635C200601418 @default.
- W777728635 hasConceptScore W777728635C2524010 @default.
- W777728635 hasConceptScore W777728635C28719098 @default.
- W777728635 hasConceptScore W777728635C33923547 @default.
- W777728635 hasConceptScore W777728635C41008148 @default.
- W777728635 hasConceptScore W777728635C66018809 @default.
- W777728635 hasConceptScore W777728635C79403827 @default.
- W777728635 hasConceptScore W777728635C93389723 @default.
- W777728635 hasConceptScore W777728635C98045186 @default.
- W777728635 hasIssue "3" @default.
- W777728635 hasLocation W7777286351 @default.
- W777728635 hasOpenAccess W777728635 @default.
- W777728635 hasPrimaryLocation W7777286351 @default.
- W777728635 hasRelatedWork W2072970123 @default.
- W777728635 hasRelatedWork W2086780909 @default.
- W777728635 hasRelatedWork W2099077205 @default.
- W777728635 hasRelatedWork W2125663922 @default.
- W777728635 hasRelatedWork W2156960771 @default.
- W777728635 hasRelatedWork W2157478453 @default.
- W777728635 hasRelatedWork W2470902751 @default.
- W777728635 hasRelatedWork W2490129161 @default.
- W777728635 hasRelatedWork W2526657819 @default.
- W777728635 hasRelatedWork W2907383600 @default.
- W777728635 hasRelatedWork W3093778996 @default.
- W777728635 hasRelatedWork W1524755226 @default.
- W777728635 hasRelatedWork W2876277766 @default.
- W777728635 hasRelatedWork W2923632558 @default.
- W777728635 hasRelatedWork W2926794880 @default.
- W777728635 hasRelatedWork W2932761566 @default.
- W777728635 hasRelatedWork W2958813549 @default.
- W777728635 hasRelatedWork W2960507450 @default.
- W777728635 hasRelatedWork W3028390292 @default.
- W777728635 hasRelatedWork W3094178726 @default.
- W777728635 hasVolume "36" @default.
- W777728635 isParatext "false" @default.
- W777728635 isRetracted "false" @default.
- W777728635 magId "777728635" @default.
- W777728635 workType "article" @default.