SemOpenAlex |

SemOpenAlex

Matches in SemOpenAlex for { <https://semopenalex.org/work/W792317009> ?p ?o ?g. }

Showing items 1 to 100 of ±109 with 100 items per page.

W792317009 endingPage "572" @default.
W792317009 startingPage "566" @default.
W792317009 abstract "The main goal of this study was to develop a micro-fabrication process for the capacitive micromachined ultrasonic transducer (cMUT). In order to achieve this goal, the former research results of the micro-electro-mechanical system (MEMS) process for the cMUT were analyzed. The membrane deposition, sacrificial layer deposition and etching were found to be a main process of fabricating the cMUT. The optimal conditions for those microfabrication were determined by the experiment. The thickness, uniformity, and residual stress of the deposition which forms the membrane of the cMUT were characterized after growing the on Si-wafer under various process conditions. As a sacrificial layer, the growth rate of the deposition was analyzed under several process conditions. The optimal etching conditions of the sacrificial layer were analyzed. The microfabrication process developed in this study will be used to fabricate the cMUT." @default.
W792317009 created "2016-06-24" @default.
W792317009 creator A5010822935 @default.
W792317009 creator A5039766815 @default.
W792317009 creator A5060261549 @default.
W792317009 creator A5062524754 @default.
W792317009 creator A5079444013 @default.
W792317009 creator A5090151532 @default.
W792317009 date "2004-01-01" @default.
W792317009 modified "2023-09-24" @default.
W792317009 title "Development of capacitive Micromachined Ultrasonic Transducer (II) : Analysis of Microfabrication Process" @default.
W792317009 hasPublicationYear "2004" @default.
W792317009 type Work @default.
W792317009 sameAs 792317009 @default.
W792317009 citedByCount "0" @default.
W792317009 crossrefType "journal-article" @default.
W792317009 hasAuthorship W792317009A5010822935 @default.
W792317009 hasAuthorship W792317009A5039766815 @default.
W792317009 hasAuthorship W792317009A5060261549 @default.
W792317009 hasAuthorship W792317009A5062524754 @default.
W792317009 hasAuthorship W792317009A5079444013 @default.
W792317009 hasAuthorship W792317009A5090151532 @default.
W792317009 hasConcept C100082104 @default.
W792317009 hasConcept C100460472 @default.
W792317009 hasConcept C119599485 @default.
W792317009 hasConcept C121332964 @default.
W792317009 hasConcept C127413603 @default.
W792317009 hasConcept C136525101 @default.
W792317009 hasConcept C142724271 @default.
W792317009 hasConcept C145667562 @default.
W792317009 hasConcept C151730666 @default.
W792317009 hasConcept C159985019 @default.
W792317009 hasConcept C160671074 @default.
W792317009 hasConcept C171250308 @default.
W792317009 hasConcept C192562407 @default.
W792317009 hasConcept C204787440 @default.
W792317009 hasConcept C206755178 @default.
W792317009 hasConcept C24890656 @default.
W792317009 hasConcept C2779227376 @default.
W792317009 hasConcept C2816523 @default.
W792317009 hasConcept C37292000 @default.
W792317009 hasConcept C37977207 @default.
W792317009 hasConcept C49040817 @default.
W792317009 hasConcept C527607 @default.
W792317009 hasConcept C56318395 @default.
W792317009 hasConcept C58772458 @default.
W792317009 hasConcept C64297162 @default.
W792317009 hasConcept C71924100 @default.
W792317009 hasConcept C81288441 @default.
W792317009 hasConcept C86803240 @default.
W792317009 hasConceptScore W792317009C100082104 @default.
W792317009 hasConceptScore W792317009C100460472 @default.
W792317009 hasConceptScore W792317009C119599485 @default.
W792317009 hasConceptScore W792317009C121332964 @default.
W792317009 hasConceptScore W792317009C127413603 @default.
W792317009 hasConceptScore W792317009C136525101 @default.
W792317009 hasConceptScore W792317009C142724271 @default.
W792317009 hasConceptScore W792317009C145667562 @default.
W792317009 hasConceptScore W792317009C151730666 @default.
W792317009 hasConceptScore W792317009C159985019 @default.
W792317009 hasConceptScore W792317009C160671074 @default.
W792317009 hasConceptScore W792317009C171250308 @default.
W792317009 hasConceptScore W792317009C192562407 @default.
W792317009 hasConceptScore W792317009C204787440 @default.
W792317009 hasConceptScore W792317009C206755178 @default.
W792317009 hasConceptScore W792317009C24890656 @default.
W792317009 hasConceptScore W792317009C2779227376 @default.
W792317009 hasConceptScore W792317009C2816523 @default.
W792317009 hasConceptScore W792317009C37292000 @default.
W792317009 hasConceptScore W792317009C37977207 @default.
W792317009 hasConceptScore W792317009C49040817 @default.
W792317009 hasConceptScore W792317009C527607 @default.
W792317009 hasConceptScore W792317009C56318395 @default.
W792317009 hasConceptScore W792317009C58772458 @default.
W792317009 hasConceptScore W792317009C64297162 @default.
W792317009 hasConceptScore W792317009C71924100 @default.
W792317009 hasConceptScore W792317009C81288441 @default.
W792317009 hasConceptScore W792317009C86803240 @default.
W792317009 hasIssue "6" @default.
W792317009 hasLocation W7923170091 @default.
W792317009 hasOpenAccess W792317009 @default.
W792317009 hasPrimaryLocation W7923170091 @default.
W792317009 hasRelatedWork W1485887211 @default.
W792317009 hasRelatedWork W2062138518 @default.
W792317009 hasRelatedWork W2102196169 @default.
W792317009 hasRelatedWork W2105241876 @default.
W792317009 hasRelatedWork W2160472045 @default.
W792317009 hasRelatedWork W2165406958 @default.
W792317009 hasRelatedWork W2315288307 @default.
W792317009 hasRelatedWork W2344710050 @default.
W792317009 hasRelatedWork W2462309816 @default.
W792317009 hasRelatedWork W2529298148 @default.
W792317009 hasRelatedWork W2540369590 @default.
W792317009 hasRelatedWork W2791684749 @default.
W792317009 hasRelatedWork W2898221013 @default.
W792317009 hasRelatedWork W2907197029 @default.
W792317009 hasRelatedWork W2996074754 @default.
W792317009 hasRelatedWork W2996288834 @default.