FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W798050107> ?p ?o ?g. }

• W798050107 endingPage "1848" @default.
• W798050107 startingPage "1843" @default.
• W798050107 abstract "The effects of silicon etching and subsequent metallization during the fabrication of tungsten-lined open TSVs are examined using a combination of measurements and simulations. The total stress through a tungsten film deposited on a flat wafer is measured and finite element simulations are performed in order to identify the intrinsic and thermal stress components in the film. The data is then used to observe and model the stress through a TSV structure, which is etched using the DRIE process, resulting in scalloped inner sidewalls through the TSV opening. The scalloped structure is then compared to the ideal flat alternative with regard to the stress through the metal film and the TSV's electrical parameters, including resistance, capacitance, and inductance. It is found that the stress around the scallop varies significantly while the average stress through the tungsten in the flat TSV is only slightly higher than the stress observed through the scalloped structure. The resistance, capacitance, and inductance are all found to increase in the presence of scallops." @default.
• W798050107 created "2016-06-24" @default.
• W798050107 creator A5017830788 @default.
• W798050107 creator A5034623050 @default.
• W798050107 creator A5043510129 @default.
• W798050107 creator A5061038355 @default.
• W798050107 creator A5083434497 @default.
• W798050107 date "2015-08-01" @default.
• W798050107 modified "2023-09-26" @default.
• W798050107 title "Intrinsic stress analysis of tungsten-lined open TSVs" @default.
• W798050107 cites W1972704743 @default.
• W798050107 cites W1976573534 @default.
• W798050107 cites W1983874564 @default.
• W798050107 cites W2007314977 @default.
• W798050107 cites W2024728974 @default.
• W798050107 cites W2027523812 @default.
• W798050107 cites W2046139226 @default.
• W798050107 cites W2052482176 @default.
• W798050107 cites W2074453262 @default.
• W798050107 cites W2106092571 @default.
• W798050107 cites W2140921596 @default.
• W798050107 cites W2162908599 @default.
• W798050107 cites W2318483687 @default.
• W798050107 cites W2081894414 @default.
• W798050107 doi "https://doi.org/10.1016/j.microrel.2015.06.014" @default.
• W798050107 hasPublicationYear "2015" @default.
• W798050107 type Work @default.
• W798050107 sameAs 798050107 @default.
• W798050107 citedByCount "10" @default.
• W798050107 countsByYear W7980501072016 @default.
• W798050107 countsByYear W7980501072018 @default.
• W798050107 countsByYear W7980501072019 @default.
• W798050107 countsByYear W7980501072021 @default.
• W798050107 countsByYear W7980501072023 @default.
• W798050107 crossrefType "journal-article" @default.
• W798050107 hasAuthorship W798050107A5017830788 @default.
• W798050107 hasAuthorship W798050107A5034623050 @default.
• W798050107 hasAuthorship W798050107A5043510129 @default.
• W798050107 hasAuthorship W798050107A5061038355 @default.
• W798050107 hasAuthorship W798050107A5083434497 @default.
• W798050107 hasConcept C100460472 @default.
• W798050107 hasConcept C119599485 @default.
• W798050107 hasConcept C124634506 @default.
• W798050107 hasConcept C127413603 @default.
• W798050107 hasConcept C130472188 @default.
• W798050107 hasConcept C135628077 @default.
• W798050107 hasConcept C136525101 @default.
• W798050107 hasConcept C138885662 @default.
• W798050107 hasConcept C142724271 @default.
• W798050107 hasConcept C147789679 @default.
• W798050107 hasConcept C159985019 @default.
• W798050107 hasConcept C160671074 @default.
• W798050107 hasConcept C165801399 @default.
• W798050107 hasConcept C17525397 @default.
• W798050107 hasConcept C185592680 @default.
• W798050107 hasConcept C191897082 @default.
• W798050107 hasConcept C192562407 @default.
• W798050107 hasConcept C204787440 @default.
• W798050107 hasConcept C21036866 @default.
• W798050107 hasConcept C2779227376 @default.
• W798050107 hasConcept C29210110 @default.
• W798050107 hasConcept C30066665 @default.
• W798050107 hasConcept C41895202 @default.
• W798050107 hasConcept C45632049 @default.
• W798050107 hasConcept C49040817 @default.
• W798050107 hasConcept C542268612 @default.
• W798050107 hasConcept C544956773 @default.
• W798050107 hasConcept C66938386 @default.
• W798050107 hasConcept C71924100 @default.
• W798050107 hasConceptScore W798050107C100460472 @default.
• W798050107 hasConceptScore W798050107C119599485 @default.
• W798050107 hasConceptScore W798050107C124634506 @default.
• W798050107 hasConceptScore W798050107C127413603 @default.
• W798050107 hasConceptScore W798050107C130472188 @default.
• W798050107 hasConceptScore W798050107C135628077 @default.
• W798050107 hasConceptScore W798050107C136525101 @default.
• W798050107 hasConceptScore W798050107C138885662 @default.
• W798050107 hasConceptScore W798050107C142724271 @default.
• W798050107 hasConceptScore W798050107C147789679 @default.
• W798050107 hasConceptScore W798050107C159985019 @default.
• W798050107 hasConceptScore W798050107C160671074 @default.
• W798050107 hasConceptScore W798050107C165801399 @default.
• W798050107 hasConceptScore W798050107C17525397 @default.
• W798050107 hasConceptScore W798050107C185592680 @default.
• W798050107 hasConceptScore W798050107C191897082 @default.
• W798050107 hasConceptScore W798050107C192562407 @default.
• W798050107 hasConceptScore W798050107C204787440 @default.
• W798050107 hasConceptScore W798050107C21036866 @default.
• W798050107 hasConceptScore W798050107C2779227376 @default.
• W798050107 hasConceptScore W798050107C29210110 @default.
• W798050107 hasConceptScore W798050107C30066665 @default.
• W798050107 hasConceptScore W798050107C41895202 @default.
• W798050107 hasConceptScore W798050107C45632049 @default.
• W798050107 hasConceptScore W798050107C49040817 @default.
• W798050107 hasConceptScore W798050107C542268612 @default.
• W798050107 hasConceptScore W798050107C544956773 @default.
• W798050107 hasConceptScore W798050107C66938386 @default.
• W798050107 hasConceptScore W798050107C71924100 @default.

• next