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- W802552712 abstract "Highly c-axis oriented Zinc oxide (ZnO) films were successfully deposited at room temperature by oxygen ion-assisted pulsed filtered vacuum arc. The effect of oxygen gas ratio ( on the preferred orientation, surface morphology and resistivity of the ZnO films were investigated. Highly crystalline ZnO films with (002) orientation were obtained at over of oxygen gas ratio. Increasing oxygen gas ratio up to was found to improve crystallinity of the films. From hall measurements, it was found that the film has n-type characteristic and carrier concentration and its mobility were closely related with oxygen gas ratio. Minimal resistivity of was obtained in the range of to of oxygen gas ratio." @default.
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- W802552712 date "2005-01-01" @default.
- W802552712 modified "2023-09-24" @default.
- W802552712 title "Room-Temperature Deposition of ZnO Thin Film by Pulsed Vacuum Arc and Effect of Oxygen Gas Ratio on Its Electrical Properties" @default.
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