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- W804924484 abstract "To realize extreme ultraviolet (EUV) lithography for mass production of semiconductor devices, enhancements of performance of chemically amplified resist have been still important issue. In EUV resist, radiation chemical reactions occur after irradiations of the EUV light. Dynamics of chemical intermediates of EUV resist after exposure to the ionizing radiations is important for understanding new resist design. Fluorinated resists have been developed for ArF, F2, and EUV lithography. Fluorinated polymers are effective to enhance the sensitivity of the EUV resist because F atom has higher absorptivity of EUV photons. However, the fluorination effect on the radiation chemical reactions in the resist has not been clarified in detail. In this study, we investigated the dynamics of radical ions of fluorinated polymers (FPs) by pulse radiolysis method and quantum chemical calculations to clarify the reaction mechanism for EUV lithography." @default.
- W804924484 created "2016-06-24" @default.
- W804924484 creator A5014467621 @default.
- W804924484 creator A5029041214 @default.
- W804924484 creator A5037346718 @default.
- W804924484 creator A5050045974 @default.
- W804924484 creator A5055649505 @default.
- W804924484 creator A5090399440 @default.
- W804924484 date "2015-07-09" @default.
- W804924484 modified "2023-09-26" @default.
- W804924484 title "Dynamics of radical ions of fluorinated polymer for Extreme Ultraviolet (EUV) lithography" @default.
- W804924484 cites W1492150742 @default.
- W804924484 cites W1999319995 @default.
- W804924484 cites W2016043888 @default.
- W804924484 cites W2027253590 @default.
- W804924484 cites W2029987524 @default.
- W804924484 cites W2030835770 @default.
- W804924484 cites W2076278348 @default.
- W804924484 cites W2091942733 @default.
- W804924484 cites W4253936586 @default.
- W804924484 cites W646816100 @default.
- W804924484 doi "https://doi.org/10.1117/12.2193060" @default.
- W804924484 hasPublicationYear "2015" @default.
- W804924484 type Work @default.
- W804924484 sameAs 804924484 @default.
- W804924484 citedByCount "0" @default.
- W804924484 crossrefType "proceedings-article" @default.
- W804924484 hasAuthorship W804924484A5014467621 @default.
- W804924484 hasAuthorship W804924484A5029041214 @default.
- W804924484 hasAuthorship W804924484A5037346718 @default.
- W804924484 hasAuthorship W804924484A5050045974 @default.
- W804924484 hasAuthorship W804924484A5055649505 @default.
- W804924484 hasAuthorship W804924484A5090399440 @default.
- W804924484 hasConcept C120665830 @default.
- W804924484 hasConcept C121332964 @default.
- W804924484 hasConcept C145148216 @default.
- W804924484 hasConcept C146024833 @default.
- W804924484 hasConcept C162996421 @default.
- W804924484 hasConcept C171250308 @default.
- W804924484 hasConcept C178790620 @default.
- W804924484 hasConcept C185592680 @default.
- W804924484 hasConcept C192562407 @default.
- W804924484 hasConcept C204223013 @default.
- W804924484 hasConcept C2776798109 @default.
- W804924484 hasConcept C2779227376 @default.
- W804924484 hasConcept C49040817 @default.
- W804924484 hasConcept C520434653 @default.
- W804924484 hasConcept C521977710 @default.
- W804924484 hasConcept C53524968 @default.
- W804924484 hasConcept C75473681 @default.
- W804924484 hasConceptScore W804924484C120665830 @default.
- W804924484 hasConceptScore W804924484C121332964 @default.
- W804924484 hasConceptScore W804924484C145148216 @default.
- W804924484 hasConceptScore W804924484C146024833 @default.
- W804924484 hasConceptScore W804924484C162996421 @default.
- W804924484 hasConceptScore W804924484C171250308 @default.
- W804924484 hasConceptScore W804924484C178790620 @default.
- W804924484 hasConceptScore W804924484C185592680 @default.
- W804924484 hasConceptScore W804924484C192562407 @default.
- W804924484 hasConceptScore W804924484C204223013 @default.
- W804924484 hasConceptScore W804924484C2776798109 @default.
- W804924484 hasConceptScore W804924484C2779227376 @default.
- W804924484 hasConceptScore W804924484C49040817 @default.
- W804924484 hasConceptScore W804924484C520434653 @default.
- W804924484 hasConceptScore W804924484C521977710 @default.
- W804924484 hasConceptScore W804924484C53524968 @default.
- W804924484 hasConceptScore W804924484C75473681 @default.
- W804924484 hasLocation W8049244841 @default.
- W804924484 hasOpenAccess W804924484 @default.
- W804924484 hasPrimaryLocation W8049244841 @default.
- W804924484 hasRelatedWork W1982529547 @default.
- W804924484 hasRelatedWork W1984815737 @default.
- W804924484 hasRelatedWork W1992860136 @default.
- W804924484 hasRelatedWork W2012716935 @default.
- W804924484 hasRelatedWork W2023720350 @default.
- W804924484 hasRelatedWork W2024278109 @default.
- W804924484 hasRelatedWork W2027253590 @default.
- W804924484 hasRelatedWork W2042461050 @default.
- W804924484 hasRelatedWork W2049403545 @default.
- W804924484 hasRelatedWork W2058273608 @default.
- W804924484 hasRelatedWork W2081938409 @default.
- W804924484 hasRelatedWork W2089089390 @default.
- W804924484 hasRelatedWork W2152604102 @default.
- W804924484 hasRelatedWork W2326752699 @default.
- W804924484 hasRelatedWork W2618983857 @default.
- W804924484 hasRelatedWork W2931681924 @default.
- W804924484 hasRelatedWork W3131571852 @default.
- W804924484 hasRelatedWork W3132617025 @default.
- W804924484 hasRelatedWork W3138682823 @default.
- W804924484 hasRelatedWork W2769944270 @default.
- W804924484 isParatext "false" @default.
- W804924484 isRetracted "false" @default.
- W804924484 magId "804924484" @default.
- W804924484 workType "article" @default.