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- W806784126 abstract "An improved photon-emission-microscope (PEM) instrumentation system has been developed for use in diagnosing failure conditions in semiconductor devices, including complex integrated circuits. This system is designed primarily to image areas that emit photons, at wavelengths from 400 to 1,100 nm, associated with device failures caused by leakage of electric current through SiO2 and other dielectric materials used in multilayer semiconductor structures. In addition, the system is sensitive enough to image areas that emit photons during normal operation." @default.
- W806784126 created "2016-06-24" @default.
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- W806784126 date "2006-05-01" @default.
- W806784126 modified "2023-09-26" @default.
- W806784126 title "Improved Photon-Emission-Microscope System" @default.
- W806784126 hasPublicationYear "2006" @default.
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