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- W811582387 abstract "The results of synthesis of a dielectric film on a silicon surface in the plasma formed by non-self-glow discharge with hollow cathode in the atmosphere of nitrogen and argon at pressure of 14-16 Pa are shown in this article. The current density through dielectric film was not exceeded 0,6 мА/см2, and by its temperature of 150 Celsius degree. It is shown that the continuous defect-free silicon oxynitride film is formed with a growth rate of 65-67 nm/min on the surface of the silicon" @default.
- W811582387 created "2016-06-24" @default.
- W811582387 creator A5022922938 @default.
- W811582387 creator A5084241034 @default.
- W811582387 date "2012-01-01" @default.
- W811582387 modified "2023-09-23" @default.
- W811582387 title "Синтез диэлектрической пленки на поверхности кремния в плазме несамостоятельного тлеющего разряда с полым катодом" @default.
- W811582387 hasPublicationYear "2012" @default.
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