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- W81502037 abstract "Packaged micromechanical sensors were fabricated using bonded glass-silicon microstructures. These are integrated, resonant, or force-balancing sensors. Distributed electrostatic microactuator (DEMA) and three-dimensional microfabrication methods were developed." @default.
- W81502037 created "2016-06-24" @default.
- W81502037 creator A5055348625 @default.
- W81502037 date "1995-06-20" @default.
- W81502037 modified "2023-09-26" @default.
- W81502037 title "Packaged Sensors, Microactuators and Three-Dimensional Microfabrication" @default.
- W81502037 doi "https://doi.org/10.20965/jrm.1995.p0200" @default.
- W81502037 hasPublicationYear "1995" @default.
- W81502037 type Work @default.
- W81502037 sameAs 81502037 @default.
- W81502037 citedByCount "5" @default.
- W81502037 crossrefType "journal-article" @default.
- W81502037 hasAuthorship W81502037A5055348625 @default.
- W81502037 hasConcept C136525101 @default.
- W81502037 hasConcept C142724271 @default.
- W81502037 hasConcept C171250308 @default.
- W81502037 hasConcept C192562407 @default.
- W81502037 hasConcept C204787440 @default.
- W81502037 hasConcept C41008148 @default.
- W81502037 hasConcept C527607 @default.
- W81502037 hasConcept C71924100 @default.
- W81502037 hasConceptScore W81502037C136525101 @default.
- W81502037 hasConceptScore W81502037C142724271 @default.
- W81502037 hasConceptScore W81502037C171250308 @default.
- W81502037 hasConceptScore W81502037C192562407 @default.
- W81502037 hasConceptScore W81502037C204787440 @default.
- W81502037 hasConceptScore W81502037C41008148 @default.
- W81502037 hasConceptScore W81502037C527607 @default.
- W81502037 hasConceptScore W81502037C71924100 @default.
- W81502037 hasLocation W815020371 @default.
- W81502037 hasOpenAccess W81502037 @default.
- W81502037 hasPrimaryLocation W815020371 @default.
- W81502037 hasRelatedWork W1530451521 @default.
- W81502037 hasRelatedWork W1908092540 @default.
- W81502037 hasRelatedWork W1968568061 @default.
- W81502037 hasRelatedWork W2007592728 @default.
- W81502037 hasRelatedWork W2051224059 @default.
- W81502037 hasRelatedWork W2103934835 @default.
- W81502037 hasRelatedWork W2164181704 @default.
- W81502037 hasRelatedWork W2164992503 @default.
- W81502037 hasRelatedWork W2289014475 @default.
- W81502037 hasRelatedWork W2315159520 @default.
- W81502037 hasRelatedWork W2331692725 @default.
- W81502037 hasRelatedWork W2334529823 @default.
- W81502037 hasRelatedWork W2367499065 @default.
- W81502037 hasRelatedWork W2570873087 @default.
- W81502037 hasRelatedWork W2955290271 @default.
- W81502037 hasRelatedWork W3028161158 @default.
- W81502037 hasRelatedWork W3028300815 @default.
- W81502037 hasRelatedWork W45017184 @default.
- W81502037 hasRelatedWork W2815131052 @default.
- W81502037 hasRelatedWork W2922743426 @default.
- W81502037 isParatext "false" @default.
- W81502037 isRetracted "false" @default.
- W81502037 magId "81502037" @default.
- W81502037 workType "article" @default.