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- W818566784 abstract "In the fie ld of thin-fi lm research, there exists a novel method of fi lm growth called Plasma Enhanced Chemical Vapor Deposition or PECVD. Thi s technique utilizes the energetic electrons released from a plasma discharge to help catalyze chemical reactions in the deposition chamber that are essential to the fi lm-growth process. Because plasma dynamics are not very well understood, much research goes into developing techniques to characterize a plasma's properties. In our research, we examined techniques used to measure the current versus voltage characteristic of an Argon plasma by use of a Langmuir Probe with the ultimate goal of determining the plasma's electron energy distribution." @default.
- W818566784 created "2016-06-24" @default.
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- W818566784 date "2014-01-01" @default.
- W818566784 modified "2023-09-24" @default.
- W818566784 title "Langmuir Probe Measurements of an Argon Plasma" @default.
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- W818566784 hasPublicationYear "2014" @default.
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