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- W8205460 endingPage "12" @default.
- W8205460 startingPage "7" @default.
- W8205460 abstract "This study reports on the growth and characterization of TiN thib films obtained by atomic layer deposition at 350-425 ◦C. We observe a growth of the continuous layers from the very beginning of the process, i.e. for a thickness of 0.65 nm, which is equivalent to 3 monolayers of TiN. The film growth stabilizes in a self-limiting surface-reaction mode represented by a constant growth rate of 0.02 nm/cycle. We further report on the resistivity of ultra-thin TiN films and its evolution with film thickness. The resistivity is determined by both optical spectroscopic ellipsometry and electrical techniques. The latter includes circular transfer length method and linear test structures. The resistivity increased significantly with decreasing film thickness below 4 nm, as well as the discrepancy between the optical and electrical method. This is attributed to the scattering effects of conduction electrons. Native oxidation of a few nm thick TiN films leads to non-linear I–V characteristics." @default.
- W8205460 created "2016-06-24" @default.
- W8205460 creator A5008300217 @default.
- W8205460 creator A5034409493 @default.
- W8205460 creator A5089104280 @default.
- W8205460 date "2012-12-14" @default.
- W8205460 modified "2023-09-24" @default.
- W8205460 title "TiN films by Atomic Layer Deposition: Growth and electrical characterization down to sub-nm thickness" @default.
- W8205460 hasPublicationYear "2012" @default.
- W8205460 type Work @default.
- W8205460 sameAs 8205460 @default.
- W8205460 citedByCount "0" @default.
- W8205460 crossrefType "journal-article" @default.
- W8205460 hasAuthorship W8205460A5008300217 @default.
- W8205460 hasAuthorship W8205460A5034409493 @default.
- W8205460 hasAuthorship W8205460A5089104280 @default.
- W8205460 hasConcept C111368507 @default.
- W8205460 hasConcept C113196181 @default.
- W8205460 hasConcept C119599485 @default.
- W8205460 hasConcept C120665830 @default.
- W8205460 hasConcept C121332964 @default.
- W8205460 hasConcept C127313418 @default.
- W8205460 hasConcept C127413603 @default.
- W8205460 hasConcept C151730666 @default.
- W8205460 hasConcept C171250308 @default.
- W8205460 hasConcept C18293161 @default.
- W8205460 hasConcept C185592680 @default.
- W8205460 hasConcept C19067145 @default.
- W8205460 hasConcept C191486275 @default.
- W8205460 hasConcept C191897082 @default.
- W8205460 hasConcept C192562407 @default.
- W8205460 hasConcept C2777289219 @default.
- W8205460 hasConcept C2779227376 @default.
- W8205460 hasConcept C2816523 @default.
- W8205460 hasConcept C43617362 @default.
- W8205460 hasConcept C525849907 @default.
- W8205460 hasConcept C64297162 @default.
- W8205460 hasConcept C69544855 @default.
- W8205460 hasConcept C69990965 @default.
- W8205460 hasConcept C86803240 @default.
- W8205460 hasConceptScore W8205460C111368507 @default.
- W8205460 hasConceptScore W8205460C113196181 @default.
- W8205460 hasConceptScore W8205460C119599485 @default.
- W8205460 hasConceptScore W8205460C120665830 @default.
- W8205460 hasConceptScore W8205460C121332964 @default.
- W8205460 hasConceptScore W8205460C127313418 @default.
- W8205460 hasConceptScore W8205460C127413603 @default.
- W8205460 hasConceptScore W8205460C151730666 @default.
- W8205460 hasConceptScore W8205460C171250308 @default.
- W8205460 hasConceptScore W8205460C18293161 @default.
- W8205460 hasConceptScore W8205460C185592680 @default.
- W8205460 hasConceptScore W8205460C19067145 @default.
- W8205460 hasConceptScore W8205460C191486275 @default.
- W8205460 hasConceptScore W8205460C191897082 @default.
- W8205460 hasConceptScore W8205460C192562407 @default.
- W8205460 hasConceptScore W8205460C2777289219 @default.
- W8205460 hasConceptScore W8205460C2779227376 @default.
- W8205460 hasConceptScore W8205460C2816523 @default.
- W8205460 hasConceptScore W8205460C43617362 @default.
- W8205460 hasConceptScore W8205460C525849907 @default.
- W8205460 hasConceptScore W8205460C64297162 @default.
- W8205460 hasConceptScore W8205460C69544855 @default.
- W8205460 hasConceptScore W8205460C69990965 @default.
- W8205460 hasConceptScore W8205460C86803240 @default.
- W8205460 hasLocation W82054601 @default.
- W8205460 hasOpenAccess W8205460 @default.
- W8205460 hasPrimaryLocation W82054601 @default.
- W8205460 hasRelatedWork W1964585953 @default.
- W8205460 hasRelatedWork W1977671021 @default.
- W8205460 hasRelatedWork W1988575219 @default.
- W8205460 hasRelatedWork W2002776622 @default.
- W8205460 hasRelatedWork W2032178184 @default.
- W8205460 hasRelatedWork W2037284901 @default.
- W8205460 hasRelatedWork W2038901588 @default.
- W8205460 hasRelatedWork W2080766322 @default.
- W8205460 hasRelatedWork W2088423895 @default.
- W8205460 hasRelatedWork W2091126851 @default.
- W8205460 hasRelatedWork W2091660274 @default.
- W8205460 hasRelatedWork W2097405507 @default.
- W8205460 hasRelatedWork W2125581761 @default.
- W8205460 hasRelatedWork W2155972007 @default.
- W8205460 hasRelatedWork W2366310563 @default.
- W8205460 hasRelatedWork W2568283859 @default.
- W8205460 hasRelatedWork W2926010225 @default.
- W8205460 hasRelatedWork W3036429281 @default.
- W8205460 hasRelatedWork W3139999847 @default.
- W8205460 hasRelatedWork W2291080777 @default.
- W8205460 isParatext "false" @default.
- W8205460 isRetracted "false" @default.
- W8205460 magId "8205460" @default.
- W8205460 workType "article" @default.