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- W82760619 abstract "Since its discovery, porous silicon (PSi) has long been studied for its optical properties, its bio-compatibility and its high reactivity due to its large specific surface area. In photovoltaics and in some integrated circuit applications, it has been also used as a tunable sacrificial layer. In some cases, the sacrificial PSi is annealed at high temperature to make the porous structure reorganize. If its initial porosity is within a certain range, then the columnar pores reorganize into sphere-like pores and the closed top surface can be employed for high quality epitaxial growth. To optimize these techniques, the evaluation of the mechanical properties of sintered PSi layers is paramount. Nonetheless, no experimental data are reported in literature. The content of this work is twofold. First, a range of porosities within which the pores reorganize in a closed structure is identified. Second, the PSi mechanical properties are evaluated by spherical indentation and surface acoustic wave analysis. The values are compared with a numerical model based on homogenization theory that was previously proposed by some of the authors. The characterization methods are shown to be consistent, with measured values within bounds predicted by the numerical model." @default.
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- W82760619 date "2014-01-01" @default.
- W82760619 modified "2023-09-23" @default.
- W82760619 title "On the elastic response of sintered porous silicon layers" @default.
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