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- W830141991 endingPage "679" @default.
- W830141991 startingPage "673" @default.
- W830141991 abstract "A sublimation method using the SiC seed crystal and SiC powder as the source material is commonly adopted to grow SiC bulk single crystal. However, it has proved to be difficult to achieve the high quality crystal and the process reliability because SiC single crystal should be grown at very high temperature in closed system. In this study, SiC crystal boules were prepared with different angles in trapezoid-shaped graphite seed holders using sublimation physical vapor transport technique (PVT) and then their crystal quality was systematically investigated. The temperature distribution in the growth system and the crystal shape were varied with angles in trapezoid-shaped graphite seed holders, which was successfully simulated using 'Virtual Reactor'. The SiC polytype proved to be the n-type 6H-SiC from the typical absorption spectrum of SiC crystal. The micropipe densities of SiC wafers in this study were measured to be < <TEX>$100/cm^2$</TEX>. Consequently, SiC single crystal with large diameter was successfully achieved with changing angle in trapezoid-shaped graphite seed holders." @default.
- W830141991 created "2016-06-24" @default.
- W830141991 date "2006-07-01" @default.
- W830141991 modified "2023-09-26" @default.
- W830141991 title "Diameter Expansion of 6H-SiC Single Crystals by the Modification of Crucible Structure Design" @default.
- W830141991 cites W1975451559 @default.
- W830141991 cites W1994214679 @default.
- W830141991 doi "https://doi.org/10.4313/jkem.2006.19.7.673" @default.
- W830141991 hasPublicationYear "2006" @default.
- W830141991 type Work @default.
- W830141991 sameAs 830141991 @default.
- W830141991 citedByCount "0" @default.
- W830141991 crossrefType "journal-article" @default.
- W830141991 hasBestOaLocation W8301419911 @default.
- W830141991 hasConcept C104169306 @default.
- W830141991 hasConcept C120500152 @default.
- W830141991 hasConcept C147597530 @default.
- W830141991 hasConcept C15744967 @default.
- W830141991 hasConcept C159985019 @default.
- W830141991 hasConcept C160671074 @default.
- W830141991 hasConcept C185592680 @default.
- W830141991 hasConcept C192562407 @default.
- W830141991 hasConcept C199360897 @default.
- W830141991 hasConcept C2779698641 @default.
- W830141991 hasConcept C2780722187 @default.
- W830141991 hasConcept C2781285689 @default.
- W830141991 hasConcept C41008148 @default.
- W830141991 hasConcept C49040817 @default.
- W830141991 hasConcept C542102704 @default.
- W830141991 hasConcept C58437636 @default.
- W830141991 hasConcept C73922627 @default.
- W830141991 hasConcept C8010536 @default.
- W830141991 hasConceptScore W830141991C104169306 @default.
- W830141991 hasConceptScore W830141991C120500152 @default.
- W830141991 hasConceptScore W830141991C147597530 @default.
- W830141991 hasConceptScore W830141991C15744967 @default.
- W830141991 hasConceptScore W830141991C159985019 @default.
- W830141991 hasConceptScore W830141991C160671074 @default.
- W830141991 hasConceptScore W830141991C185592680 @default.
- W830141991 hasConceptScore W830141991C192562407 @default.
- W830141991 hasConceptScore W830141991C199360897 @default.
- W830141991 hasConceptScore W830141991C2779698641 @default.
- W830141991 hasConceptScore W830141991C2780722187 @default.
- W830141991 hasConceptScore W830141991C2781285689 @default.
- W830141991 hasConceptScore W830141991C41008148 @default.
- W830141991 hasConceptScore W830141991C49040817 @default.
- W830141991 hasConceptScore W830141991C542102704 @default.
- W830141991 hasConceptScore W830141991C58437636 @default.
- W830141991 hasConceptScore W830141991C73922627 @default.
- W830141991 hasConceptScore W830141991C8010536 @default.
- W830141991 hasIssue "7" @default.
- W830141991 hasLocation W8301419911 @default.
- W830141991 hasOpenAccess W830141991 @default.
- W830141991 hasPrimaryLocation W8301419911 @default.
- W830141991 hasRelatedWork W1988709054 @default.
- W830141991 hasRelatedWork W2023111926 @default.
- W830141991 hasRelatedWork W2054718723 @default.
- W830141991 hasRelatedWork W2071020360 @default.
- W830141991 hasRelatedWork W2071760711 @default.
- W830141991 hasRelatedWork W21905009 @default.
- W830141991 hasRelatedWork W2248969856 @default.
- W830141991 hasRelatedWork W2320779620 @default.
- W830141991 hasRelatedWork W2362283432 @default.
- W830141991 hasRelatedWork W830141991 @default.
- W830141991 hasVolume "19" @default.
- W830141991 isParatext "false" @default.
- W830141991 isRetracted "false" @default.
- W830141991 magId "830141991" @default.
- W830141991 workType "article" @default.