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- W830429016 abstract "A mathematical model of the Nikon Lampas Reflection Measuring Microscope for the fine-line lithography in integrated circuit manufacture has been developed. Optical intensity profiles of a perfect line were computed using computer software supplied by the National Bureau of Standards. The programs were modified for the Lampas microscope. From line profiles, the accuracy of the microscope was calculated. The microscope is accurate down to 6/10 of a micron. All lines below 6/10 of a micron were unresolved. ROCHESTER INSTITUTE OF TECHNOLOGY COLLEGE OF GRAPHIC ARTS AND PHOTOGRAPHY" @default.
- W830429016 created "2016-06-24" @default.
- W830429016 creator A5023035079 @default.
- W830429016 date "1985-01-01" @default.
- W830429016 modified "2023-09-23" @default.
- W830429016 title "Mathematical Modeling of the Nikon Lampas Reflection Measuring Microscope" @default.
- W830429016 cites W2000640748 @default.
- W830429016 hasPublicationYear "1985" @default.
- W830429016 type Work @default.
- W830429016 sameAs 830429016 @default.
- W830429016 citedByCount "0" @default.
- W830429016 crossrefType "journal-article" @default.
- W830429016 hasAuthorship W830429016A5023035079 @default.
- W830429016 hasConcept C119657128 @default.
- W830429016 hasConcept C120665830 @default.
- W830429016 hasConcept C121332964 @default.
- W830429016 hasConcept C121684516 @default.
- W830429016 hasConcept C142362112 @default.
- W830429016 hasConcept C147080431 @default.
- W830429016 hasConcept C153349607 @default.
- W830429016 hasConcept C192562407 @default.
- W830429016 hasConcept C198352243 @default.
- W830429016 hasConcept C199360897 @default.
- W830429016 hasConcept C2524010 @default.
- W830429016 hasConcept C26771246 @default.
- W830429016 hasConcept C33923547 @default.
- W830429016 hasConcept C41008148 @default.
- W830429016 hasConcept C65682993 @default.
- W830429016 hasConcept C67649825 @default.
- W830429016 hasConcept C77017923 @default.
- W830429016 hasConceptScore W830429016C119657128 @default.
- W830429016 hasConceptScore W830429016C120665830 @default.
- W830429016 hasConceptScore W830429016C121332964 @default.
- W830429016 hasConceptScore W830429016C121684516 @default.
- W830429016 hasConceptScore W830429016C142362112 @default.
- W830429016 hasConceptScore W830429016C147080431 @default.
- W830429016 hasConceptScore W830429016C153349607 @default.
- W830429016 hasConceptScore W830429016C192562407 @default.
- W830429016 hasConceptScore W830429016C198352243 @default.
- W830429016 hasConceptScore W830429016C199360897 @default.
- W830429016 hasConceptScore W830429016C2524010 @default.
- W830429016 hasConceptScore W830429016C26771246 @default.
- W830429016 hasConceptScore W830429016C33923547 @default.
- W830429016 hasConceptScore W830429016C41008148 @default.
- W830429016 hasConceptScore W830429016C65682993 @default.
- W830429016 hasConceptScore W830429016C67649825 @default.
- W830429016 hasConceptScore W830429016C77017923 @default.
- W830429016 hasLocation W8304290161 @default.
- W830429016 hasOpenAccess W830429016 @default.
- W830429016 hasPrimaryLocation W8304290161 @default.
- W830429016 hasRelatedWork W1981992543 @default.
- W830429016 hasRelatedWork W2384486305 @default.
- W830429016 hasRelatedWork W2620589763 @default.
- W830429016 hasRelatedWork W3184179064 @default.
- W830429016 hasRelatedWork W177042779 @default.
- W830429016 hasRelatedWork W2931538354 @default.
- W830429016 isParatext "false" @default.
- W830429016 isRetracted "false" @default.
- W830429016 magId "830429016" @default.
- W830429016 workType "article" @default.