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- W831001731 abstract "CMP (Chemical Mechanical Polishing) is to achieve adequate local and global planarization for future sub-micrometer VLSI requirements. In designing CMP, numerical computation is quite helpful in terms of reducing the amount of experimental works. Stresses on pad, concentration of particles and particle tracking are studied for design. In this research, the optimization of grooved pad shape of CMP is performed through numerical investigation of slurry flow in CMP process. The result indicates that the combination of sinusoidal groove and skewed pad is the most optimal shape among the twenty candidates. Useful information can be obtained in velocity, pressure, stress, concentration of particles and particles trajectories, etc." @default.
- W831001731 created "2016-06-24" @default.
- W831001731 date "2003-12-01" @default.
- W831001731 modified "2023-09-24" @default.
- W831001731 title "Design of Pad Groove in CMP using CFD" @default.
- W831001731 cites W2038481110 @default.
- W831001731 doi "https://doi.org/10.5293/kfma.2003.6.4.021" @default.
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