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- W834774881 abstract "The stoichiometry of oxygen atomand the oxidation state of metal atom significantly affect theformation of crystal defect in deposition of metal oxide thinfilm. Therefore, oxide films are normally cooled in highoxygen pressures to compensate for the incomplete oxygen-ation and improve the film properties." @default.
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- W834774881 date "2005-02-20" @default.
- W834774881 modified "2023-09-27" @default.
- W834774881 title "Formation of Yttrium Oxide Clusters Using Pulsed Laser Vaporization" @default.
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- W834774881 doi "https://doi.org/10.5012/bkcs.2005.26.2.345" @default.
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