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- W8348654 abstract "MEMS is the acronym for Micro Electro Mechanical Systems. The term MEMS-devices refers to parts or systems like: sensor, actuator, micro-fluidic systems and mechanicalmechanisms. The typical feature size is around micrometers, while the overall device dimension is in the range of millimetre. These devices are typically manufactured usinglithography based processing, alike the semiconductor processes. Due to the large area to volume ratio, electrostatic forces rule over inertia and mass, giving electrostatic forces in MEMS a practical application.Capacitive based sensing is a method to measure a displacement by means of an electromagnetic field enclosed between two or more electric guiding plates. For commoncapacitive based sensing the capacitance change due to a displacement, which can be measured. The application of electrostatic forces is generally used for actuation, less common the electrostatic force is used for displacement sensing. This type of displacement sensing however is used in this research." @default.
- W8348654 created "2016-06-24" @default.
- W8348654 creator A5007679574 @default.
- W8348654 date "2012-05-04" @default.
- W8348654 modified "2023-09-26" @default.
- W8348654 title "Design of a Capacitive Based Closed-Loop Displacement Sensor" @default.
- W8348654 cites W126362881 @default.
- W8348654 cites W1534665707 @default.
- W8348654 cites W1592406529 @default.
- W8348654 cites W2103349215 @default.
- W8348654 cites W2110918717 @default.
- W8348654 cites W2137178805 @default.
- W8348654 cites W595772654 @default.
- W8348654 cites W2285010619 @default.
- W8348654 hasPublicationYear "2012" @default.
- W8348654 type Work @default.
- W8348654 sameAs 8348654 @default.
- W8348654 citedByCount "0" @default.
- W8348654 crossrefType "book" @default.
- W8348654 hasAuthorship W8348654A5007679574 @default.
- W8348654 hasConcept C107551265 @default.
- W8348654 hasConcept C119599485 @default.
- W8348654 hasConcept C121332964 @default.
- W8348654 hasConcept C127413603 @default.
- W8348654 hasConcept C132651336 @default.
- W8348654 hasConcept C136525101 @default.
- W8348654 hasConcept C142724271 @default.
- W8348654 hasConcept C155840801 @default.
- W8348654 hasConcept C15744967 @default.
- W8348654 hasConcept C172707124 @default.
- W8348654 hasConcept C17525397 @default.
- W8348654 hasConcept C192562407 @default.
- W8348654 hasConcept C204787440 @default.
- W8348654 hasConcept C206755178 @default.
- W8348654 hasConcept C24890656 @default.
- W8348654 hasConcept C30066665 @default.
- W8348654 hasConcept C37977207 @default.
- W8348654 hasConcept C49040817 @default.
- W8348654 hasConcept C542102704 @default.
- W8348654 hasConcept C62520636 @default.
- W8348654 hasConcept C71924100 @default.
- W8348654 hasConcept C78519656 @default.
- W8348654 hasConceptScore W8348654C107551265 @default.
- W8348654 hasConceptScore W8348654C119599485 @default.
- W8348654 hasConceptScore W8348654C121332964 @default.
- W8348654 hasConceptScore W8348654C127413603 @default.
- W8348654 hasConceptScore W8348654C132651336 @default.
- W8348654 hasConceptScore W8348654C136525101 @default.
- W8348654 hasConceptScore W8348654C142724271 @default.
- W8348654 hasConceptScore W8348654C155840801 @default.
- W8348654 hasConceptScore W8348654C15744967 @default.
- W8348654 hasConceptScore W8348654C172707124 @default.
- W8348654 hasConceptScore W8348654C17525397 @default.
- W8348654 hasConceptScore W8348654C192562407 @default.
- W8348654 hasConceptScore W8348654C204787440 @default.
- W8348654 hasConceptScore W8348654C206755178 @default.
- W8348654 hasConceptScore W8348654C24890656 @default.
- W8348654 hasConceptScore W8348654C30066665 @default.
- W8348654 hasConceptScore W8348654C37977207 @default.
- W8348654 hasConceptScore W8348654C49040817 @default.
- W8348654 hasConceptScore W8348654C542102704 @default.
- W8348654 hasConceptScore W8348654C62520636 @default.
- W8348654 hasConceptScore W8348654C71924100 @default.
- W8348654 hasConceptScore W8348654C78519656 @default.
- W8348654 hasLocation W83486541 @default.
- W8348654 hasOpenAccess W8348654 @default.
- W8348654 hasPrimaryLocation W83486541 @default.
- W8348654 hasRelatedWork W1606633182 @default.
- W8348654 hasRelatedWork W1963484607 @default.
- W8348654 hasRelatedWork W1973507774 @default.
- W8348654 hasRelatedWork W1985718940 @default.
- W8348654 hasRelatedWork W1987518971 @default.
- W8348654 hasRelatedWork W2026253349 @default.
- W8348654 hasRelatedWork W2031435759 @default.
- W8348654 hasRelatedWork W2035935541 @default.
- W8348654 hasRelatedWork W2037732716 @default.
- W8348654 hasRelatedWork W2045554020 @default.
- W8348654 hasRelatedWork W2062723868 @default.
- W8348654 hasRelatedWork W2065440386 @default.
- W8348654 hasRelatedWork W2070715120 @default.
- W8348654 hasRelatedWork W2123546458 @default.
- W8348654 hasRelatedWork W2126772615 @default.
- W8348654 hasRelatedWork W2136217570 @default.
- W8348654 hasRelatedWork W2154354871 @default.
- W8348654 hasRelatedWork W2154793390 @default.
- W8348654 hasRelatedWork W2166866476 @default.
- W8348654 hasRelatedWork W2179210322 @default.
- W8348654 isParatext "false" @default.
- W8348654 isRetracted "false" @default.
- W8348654 magId "8348654" @default.
- W8348654 workType "book" @default.