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- W840433826 abstract "ＣｈａｒａｃｔｅｒｉｓｔｉｃｓｏｆＨｏｉｓｔＳｔｒｕｃｔｕｒｅｉｎＸ┐ＹＰｒｅｃｉｓｉｏｎＷｏｒｋｔａｂｌｅｏｆＥｌｅｃｔｒｏｎ┐ＢｅａｍＬｉｔｈｏｇｒａｐｈｙＭａｃｈｉｎｅＺｈｏｎｇＰｅｉｓｉ（钟佩思），ＬｉｕＤａｚｈｉ＊＊，ＺｈｏｕＺｈｅｎｈｕ..." @default.
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- W840433826 date "1998-01-01" @default.
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- W840433826 title "Characteristics of Hoist Structure in X-Y Precision Worktable of Electron-Beam Lithography Machine" @default.
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