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- W842458819 abstract "Several cycles of photoetching, dopant deposition, and drive-in produce selectively-doped regions and semiconductor junctions within a single chip." @default.
- W842458819 created "2016-06-24" @default.
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- W842458819 date "1970-04-01" @default.
- W842458819 modified "2023-09-27" @default.
- W842458819 title "Technique for producing bipolar and MOS field effect transistors on a single chip" @default.
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