Matches in SemOpenAlex for { <https://semopenalex.org/work/W848657356> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W848657356 endingPage "1465" @default.
- W848657356 startingPage "1461" @default.
- W848657356 abstract "A micromachined sensor part for an infrared focal plane array has been designed and fabricated. Amorphous silicon was adapted as a sensing material, and silicon nitride was used as a membrane material. To get a good efficiency of infrared absorption, the sensor was made as a cavity structure. All the processes were done in iMEMS fab. in the Electronics and Telecommunication Research Institute (ETRI). The processed MEMS sensor structure had a small membrane deflection less than . This excellent deflection property can be attributed to the rigorous balancing of the stresses of individual layers. The efficiency of infrared absorption was more than 75% in the wavelength range ." @default.
- W848657356 created "2016-06-24" @default.
- W848657356 creator A5030534337 @default.
- W848657356 creator A5035340642 @default.
- W848657356 creator A5051937422 @default.
- W848657356 creator A5055686260 @default.
- W848657356 creator A5079350412 @default.
- W848657356 creator A5085479409 @default.
- W848657356 date "2007-01-01" @default.
- W848657356 modified "2023-10-17" @default.
- W848657356 title "Development of a MEMS Structure for an Infrared Focal Plane Array" @default.
- W848657356 hasPublicationYear "2007" @default.
- W848657356 type Work @default.
- W848657356 sameAs 848657356 @default.
- W848657356 citedByCount "0" @default.
- W848657356 crossrefType "journal-article" @default.
- W848657356 hasAuthorship W848657356A5030534337 @default.
- W848657356 hasAuthorship W848657356A5035340642 @default.
- W848657356 hasAuthorship W848657356A5051937422 @default.
- W848657356 hasAuthorship W848657356A5055686260 @default.
- W848657356 hasAuthorship W848657356A5079350412 @default.
- W848657356 hasAuthorship W848657356A5085479409 @default.
- W848657356 hasConcept C119599485 @default.
- W848657356 hasConcept C120665830 @default.
- W848657356 hasConcept C121332964 @default.
- W848657356 hasConcept C127413603 @default.
- W848657356 hasConcept C138331895 @default.
- W848657356 hasConcept C158355884 @default.
- W848657356 hasConcept C178790620 @default.
- W848657356 hasConcept C185592680 @default.
- W848657356 hasConcept C192562407 @default.
- W848657356 hasConcept C2776390347 @default.
- W848657356 hasConcept C2777431650 @default.
- W848657356 hasConcept C2779667780 @default.
- W848657356 hasConcept C2781299968 @default.
- W848657356 hasConcept C2781355719 @default.
- W848657356 hasConcept C37977207 @default.
- W848657356 hasConcept C49040817 @default.
- W848657356 hasConcept C544956773 @default.
- W848657356 hasConcept C56052488 @default.
- W848657356 hasConcept C6260449 @default.
- W848657356 hasConceptScore W848657356C119599485 @default.
- W848657356 hasConceptScore W848657356C120665830 @default.
- W848657356 hasConceptScore W848657356C121332964 @default.
- W848657356 hasConceptScore W848657356C127413603 @default.
- W848657356 hasConceptScore W848657356C138331895 @default.
- W848657356 hasConceptScore W848657356C158355884 @default.
- W848657356 hasConceptScore W848657356C178790620 @default.
- W848657356 hasConceptScore W848657356C185592680 @default.
- W848657356 hasConceptScore W848657356C192562407 @default.
- W848657356 hasConceptScore W848657356C2776390347 @default.
- W848657356 hasConceptScore W848657356C2777431650 @default.
- W848657356 hasConceptScore W848657356C2779667780 @default.
- W848657356 hasConceptScore W848657356C2781299968 @default.
- W848657356 hasConceptScore W848657356C2781355719 @default.
- W848657356 hasConceptScore W848657356C37977207 @default.
- W848657356 hasConceptScore W848657356C49040817 @default.
- W848657356 hasConceptScore W848657356C544956773 @default.
- W848657356 hasConceptScore W848657356C56052488 @default.
- W848657356 hasConceptScore W848657356C6260449 @default.
- W848657356 hasIssue "8" @default.
- W848657356 hasLocation W8486573561 @default.
- W848657356 hasOpenAccess W848657356 @default.
- W848657356 hasPrimaryLocation W8486573561 @default.
- W848657356 hasRelatedWork W1989108483 @default.
- W848657356 hasRelatedWork W2004885986 @default.
- W848657356 hasRelatedWork W2037724775 @default.
- W848657356 hasRelatedWork W2067091858 @default.
- W848657356 hasRelatedWork W2085587499 @default.
- W848657356 hasRelatedWork W2101098067 @default.
- W848657356 hasRelatedWork W2105263498 @default.
- W848657356 hasRelatedWork W2390233150 @default.
- W848657356 hasRelatedWork W2592311054 @default.
- W848657356 hasRelatedWork W2970946021 @default.
- W848657356 hasRelatedWork W3088508414 @default.
- W848657356 hasRelatedWork W3151262867 @default.
- W848657356 hasRelatedWork W2185277382 @default.
- W848657356 hasRelatedWork W2835801014 @default.
- W848657356 hasRelatedWork W2837687536 @default.
- W848657356 hasRelatedWork W2842543708 @default.
- W848657356 hasRelatedWork W2858136482 @default.
- W848657356 hasRelatedWork W2864299357 @default.
- W848657356 hasRelatedWork W2929516510 @default.
- W848657356 hasRelatedWork W2929609130 @default.
- W848657356 hasVolume "56" @default.
- W848657356 isParatext "false" @default.
- W848657356 isRetracted "false" @default.
- W848657356 magId "848657356" @default.
- W848657356 workType "article" @default.