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- W849273895 abstract "Nanocrystalline Fe-Sm-O thin films were prepared by RF magnetron reactive sputtering method in mixed atmosphere with the content of 5%. The compositions of the thin films were changed by changing the number of chips. The best soft magnetic properties of the thin film with the composition of were saturation flux density of 18 kG, coercivity of 0.82 Oe and effective permeability about 2,600 at 0.5~100 MHz, respectively. The electrical resistivity of Fe-Sm-O thin films was increased with increasing the amount of Sm and O elements which combined each other, the electrical resistivity of thin film was . In case of the small amount of Sm and O elements, the microstructures of Fe-Sm-O thin films showed a precipitated phase of on the phase. With the increase of the amount of Sm and O elements, the microstructures of the Fe- Sm-O thin films were changed into a mixed structure of crystal-phase and Sm-oxide amorphous phase. The Fe-Sm-O thin films with Fe content in the range of 72~94 at% exhibited the quality factor (Q = ′/) of 7~75 up to 50 MHz." @default.
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- W849273895 date "2001-01-01" @default.
- W849273895 modified "2023-09-27" @default.
- W849273895 title "Influence of Composition on Soft Magnetic Properties of As-Deposited Fe-Sm-O Thin Films" @default.
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