Matches in SemOpenAlex for { <https://semopenalex.org/work/W853933777> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W853933777 abstract "This work aims at the development of technologies to assemble, interconnect and protect sensor elements operating in harsh environments up to 500 °C. Silicon test-chips were mounted on substrates made of Al2O3, AlN and Si3N4 to examine their influence on the sensor. Active metal brazing, glass soldering and ceramic bonding were used as mounting technologies. The stress induced in the chip by the die attachment process was analyzed by optical deformation measurements of the chips as well as by FEM-simulations and by resistance measurements. The mechanical stability of the assemblies was tested with shear-tests before and after 100 hours storage at 500 °C. In our study the glass-soldering process on an AlN substrate appeared to be the most suited technology when the reliability of SiC-MEMS is the principal criterion. In a second step an interconnection technique based on fine wire bonding was developed. When metallurgical systems consisting of Pt or Pd are used for the metallization and the wires, these interconnect systems can be stable. Up to date, we could verify the stability after temperature soak at 500 °C and during operation at 300 °C. Fig. 1 Pressure sensor in the combustion chamber of a Diesel engine. Image courtesy of Robert Bosch GmbH. Fig 2 Thin film test sensor assembled with temperature stable technologies up to 600 °C" @default.
- W853933777 created "2016-06-24" @default.
- W853933777 creator A5051660532 @default.
- W853933777 creator A5053187487 @default.
- W853933777 creator A5058438849 @default.
- W853933777 date "2013-01-01" @default.
- W853933777 modified "2023-09-28" @default.
- W853933777 title "B3.1 - Assembly and Interconnection Technologies for Sensors for Very High Temperature Applications" @default.
- W853933777 doi "https://doi.org/10.5162/sensor2013/b3.1" @default.
- W853933777 hasPublicationYear "2013" @default.
- W853933777 type Work @default.
- W853933777 sameAs 853933777 @default.
- W853933777 citedByCount "0" @default.
- W853933777 crossrefType "proceedings-article" @default.
- W853933777 hasAuthorship W853933777A5051660532 @default.
- W853933777 hasAuthorship W853933777A5053187487 @default.
- W853933777 hasAuthorship W853933777A5058438849 @default.
- W853933777 hasBestOaLocation W8539337771 @default.
- W853933777 hasConcept C111106434 @default.
- W853933777 hasConcept C111368507 @default.
- W853933777 hasConcept C119599485 @default.
- W853933777 hasConcept C121332964 @default.
- W853933777 hasConcept C123745756 @default.
- W853933777 hasConcept C127313418 @default.
- W853933777 hasConcept C127413603 @default.
- W853933777 hasConcept C134132462 @default.
- W853933777 hasConcept C140269135 @default.
- W853933777 hasConcept C159985019 @default.
- W853933777 hasConcept C163258240 @default.
- W853933777 hasConcept C165005293 @default.
- W853933777 hasConcept C171250308 @default.
- W853933777 hasConcept C191897082 @default.
- W853933777 hasConcept C192562407 @default.
- W853933777 hasConcept C2777289219 @default.
- W853933777 hasConcept C2780026712 @default.
- W853933777 hasConcept C2780722187 @default.
- W853933777 hasConcept C31258907 @default.
- W853933777 hasConcept C41008148 @default.
- W853933777 hasConcept C43214815 @default.
- W853933777 hasConcept C49040817 @default.
- W853933777 hasConcept C50296614 @default.
- W853933777 hasConcept C62520636 @default.
- W853933777 hasConcept C78519656 @default.
- W853933777 hasConcept C86171150 @default.
- W853933777 hasConceptScore W853933777C111106434 @default.
- W853933777 hasConceptScore W853933777C111368507 @default.
- W853933777 hasConceptScore W853933777C119599485 @default.
- W853933777 hasConceptScore W853933777C121332964 @default.
- W853933777 hasConceptScore W853933777C123745756 @default.
- W853933777 hasConceptScore W853933777C127313418 @default.
- W853933777 hasConceptScore W853933777C127413603 @default.
- W853933777 hasConceptScore W853933777C134132462 @default.
- W853933777 hasConceptScore W853933777C140269135 @default.
- W853933777 hasConceptScore W853933777C159985019 @default.
- W853933777 hasConceptScore W853933777C163258240 @default.
- W853933777 hasConceptScore W853933777C165005293 @default.
- W853933777 hasConceptScore W853933777C171250308 @default.
- W853933777 hasConceptScore W853933777C191897082 @default.
- W853933777 hasConceptScore W853933777C192562407 @default.
- W853933777 hasConceptScore W853933777C2777289219 @default.
- W853933777 hasConceptScore W853933777C2780026712 @default.
- W853933777 hasConceptScore W853933777C2780722187 @default.
- W853933777 hasConceptScore W853933777C31258907 @default.
- W853933777 hasConceptScore W853933777C41008148 @default.
- W853933777 hasConceptScore W853933777C43214815 @default.
- W853933777 hasConceptScore W853933777C49040817 @default.
- W853933777 hasConceptScore W853933777C50296614 @default.
- W853933777 hasConceptScore W853933777C62520636 @default.
- W853933777 hasConceptScore W853933777C78519656 @default.
- W853933777 hasConceptScore W853933777C86171150 @default.
- W853933777 hasLocation W8539337771 @default.
- W853933777 hasOpenAccess W853933777 @default.
- W853933777 hasPrimaryLocation W8539337771 @default.
- W853933777 hasRelatedWork W1493329919 @default.
- W853933777 hasRelatedWork W1549803387 @default.
- W853933777 hasRelatedWork W1591958175 @default.
- W853933777 hasRelatedWork W1913681927 @default.
- W853933777 hasRelatedWork W2002163432 @default.
- W853933777 hasRelatedWork W2040611455 @default.
- W853933777 hasRelatedWork W2085914380 @default.
- W853933777 hasRelatedWork W2100713112 @default.
- W853933777 hasRelatedWork W2101307633 @default.
- W853933777 hasRelatedWork W2101743400 @default.
- W853933777 hasRelatedWork W2102394960 @default.
- W853933777 hasRelatedWork W2127777229 @default.
- W853933777 hasRelatedWork W2142491971 @default.
- W853933777 hasRelatedWork W2164108126 @default.
- W853933777 hasRelatedWork W2171138713 @default.
- W853933777 hasRelatedWork W2367964970 @default.
- W853933777 hasRelatedWork W2382417334 @default.
- W853933777 hasRelatedWork W2562677847 @default.
- W853933777 hasRelatedWork W2902282715 @default.
- W853933777 hasRelatedWork W2903091098 @default.
- W853933777 isParatext "false" @default.
- W853933777 isRetracted "false" @default.
- W853933777 magId "853933777" @default.
- W853933777 workType "article" @default.