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- W855339729 abstract "Sputtered mask resists chemical attack from acid and has adherence to withstand prolonged submergence in etch solution without lifting from silicon surface. Even under prolonged etch conditions with significant undercutting, gold mask maintained excellent adhesion to silicon surface and imperviousness to acid." @default.
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- W855339729 date "1975-06-01" @default.
- W855339729 modified "2023-09-27" @default.
- W855339729 title "Sputtered gold mask for deep chemical etching of silicon" @default.
- W855339729 hasPublicationYear "1975" @default.
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