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- W85757619 abstract "A capacitance test circuit using strontium titanate as dielectric material was producedby means of modern thin �lm deposition techniques. The capacitance per area wasmeasured by using two di�erent measurement techniques. The quasistatic value wasfound to be C/A= 4.70 � 0.03 �F/cm2 and the value at a frequency of 1kHz was foundto be C/A= 3.85 � 0.08 �F/cm2. A characterization of this �lms with the use of atomicforce microscopy and x-ray di�raction was done.To increase this values even further, strontium doped barium titanate targets for theuse in laser ablation systems were produced by using the solid state synthesis method ata temperature of 1200�. Since this material is normally sintered at higher temperaturesan polyvinyl alcohol had to be used to produce stable targets. The purity of these targetswas checked with a x-ray di�raction scan after each process step.Two types of stoichiometry were produced: Ba0.5Sr0.5TiO3 and Ba0.67Sr0.33TiO3. Acrack was found in the latter one and so only the former could be tested in a laser ablationdevice. With a deposition temperature of 700� was the growth speed determined to be0.037 nm/pulse in an 0.13 mbar oxygen atmosphere by using laser energy density of 1.5J/cm2 from a KrF excimer laser operating at a wavelength of 248nm." @default.
- W85757619 created "2016-06-24" @default.
- W85757619 creator A5083225756 @default.
- W85757619 date "2011-01-01" @default.
- W85757619 modified "2023-09-26" @default.
- W85757619 title "High capacitance thin films" @default.
- W85757619 hasPublicationYear "2011" @default.
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