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- W857586131 abstract "The micro-gas sensor based on carbon nanotubes (CNTs) was fabricated and its gas sensing characteristics on nitrogen dioxide (<TEX>$NO_{2}$</TEX>) have been investigated. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and CNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature change to modify sensor operation. Gas sensor responses of CNT-film to <TEX>$NO_{2}$</TEX> at room temperature are reported. The sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of <TEX>$130^{circ}C$</TEX>." @default.
- W857586131 created "2016-06-24" @default.
- W857586131 date "2006-01-31" @default.
- W857586131 modified "2023-10-18" @default.
- W857586131 title "Gas sensing characteristics of carbon nanotube gas sensor using a diaphragm structure" @default.
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- W857586131 doi "https://doi.org/10.5369/jsst.2006.15.1.013" @default.
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