FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W863204525> ?p ?o ?g. }

• W863204525 abstract "Titanium nitride and titanium oxide thin films were deposited by pulsed DC reactive magnetron sputtering. In this paper the influence of reactive gas partial pressure on the properties has been studied. The process control was realized by tracking the changes in the power supply parameter - circulating power. Presented technology enables free modification in the chemical composition, from titanium-rich to stoichiometric and overstoichiometric materials. The electrical and optical properties of titanium compounds were measured and then evaluated for possible electrode applications. Thanks to the special power supply and process control, it was possible to deposit low resistivity thin films without additional substrate heating and with high deposition rate. Presented technology is suitable for substrates with low temperature resistance." @default.
• W863204525 created "2016-06-24" @default.
• W863204525 creator A5056757517 @default.
• W863204525 date "2013-01-01" @default.
• W863204525 modified "2023-09-24" @default.
• W863204525 title "Reactive pulsed magnetron sputtering of titanium : influence of process parameters on resistivity and optical properties" @default.
• W863204525 cites W1973643322 @default.
• W863204525 cites W1976742910 @default.
• W863204525 cites W1981940392 @default.
• W863204525 cites W1984646360 @default.
• W863204525 cites W1994062476 @default.
• W863204525 cites W2000804732 @default.
• W863204525 cites W2013738874 @default.
• W863204525 cites W2032370541 @default.
• W863204525 cites W2036119463 @default.
• W863204525 cites W2063568940 @default.
• W863204525 cites W2067362442 @default.
• W863204525 cites W2072800632 @default.
• W863204525 cites W2150018420 @default.
• W863204525 hasPublicationYear "2013" @default.
• W863204525 type Work @default.
• W863204525 sameAs 863204525 @default.
• W863204525 citedByCount "0" @default.
• W863204525 crossrefType "journal-article" @default.
• W863204525 hasAuthorship W863204525A5056757517 @default.
• W863204525 hasConcept C111368507 @default.
• W863204525 hasConcept C119599485 @default.
• W863204525 hasConcept C123408415 @default.
• W863204525 hasConcept C127313418 @default.
• W863204525 hasConcept C127413603 @default.
• W863204525 hasConcept C151730666 @default.
• W863204525 hasConcept C159985019 @default.
• W863204525 hasConcept C166524527 @default.
• W863204525 hasConcept C171250308 @default.
• W863204525 hasConcept C178790620 @default.
• W863204525 hasConcept C185592680 @default.
• W863204525 hasConcept C19067145 @default.
• W863204525 hasConcept C191897082 @default.
• W863204525 hasConcept C192562407 @default.
• W863204525 hasConcept C194760766 @default.
• W863204525 hasConcept C22423302 @default.
• W863204525 hasConcept C2777289219 @default.
• W863204525 hasConcept C2778489163 @default.
• W863204525 hasConcept C2779227376 @default.
• W863204525 hasConcept C2781083372 @default.
• W863204525 hasConcept C2816523 @default.
• W863204525 hasConcept C42360764 @default.
• W863204525 hasConcept C49040817 @default.
• W863204525 hasConcept C506065880 @default.
• W863204525 hasConcept C540031477 @default.
• W863204525 hasConcept C61427134 @default.
• W863204525 hasConcept C64297162 @default.
• W863204525 hasConcept C68463220 @default.
• W863204525 hasConcept C69990965 @default.
• W863204525 hasConcept C86803240 @default.
• W863204525 hasConceptScore W863204525C111368507 @default.
• W863204525 hasConceptScore W863204525C119599485 @default.
• W863204525 hasConceptScore W863204525C123408415 @default.
• W863204525 hasConceptScore W863204525C127313418 @default.
• W863204525 hasConceptScore W863204525C127413603 @default.
• W863204525 hasConceptScore W863204525C151730666 @default.
• W863204525 hasConceptScore W863204525C159985019 @default.
• W863204525 hasConceptScore W863204525C166524527 @default.
• W863204525 hasConceptScore W863204525C171250308 @default.
• W863204525 hasConceptScore W863204525C178790620 @default.
• W863204525 hasConceptScore W863204525C185592680 @default.
• W863204525 hasConceptScore W863204525C19067145 @default.
• W863204525 hasConceptScore W863204525C191897082 @default.
• W863204525 hasConceptScore W863204525C192562407 @default.
• W863204525 hasConceptScore W863204525C194760766 @default.
• W863204525 hasConceptScore W863204525C22423302 @default.
• W863204525 hasConceptScore W863204525C2777289219 @default.
• W863204525 hasConceptScore W863204525C2778489163 @default.
• W863204525 hasConceptScore W863204525C2779227376 @default.
• W863204525 hasConceptScore W863204525C2781083372 @default.
• W863204525 hasConceptScore W863204525C2816523 @default.
• W863204525 hasConceptScore W863204525C42360764 @default.
• W863204525 hasConceptScore W863204525C49040817 @default.
• W863204525 hasConceptScore W863204525C506065880 @default.
• W863204525 hasConceptScore W863204525C540031477 @default.
• W863204525 hasConceptScore W863204525C61427134 @default.
• W863204525 hasConceptScore W863204525C64297162 @default.
• W863204525 hasConceptScore W863204525C68463220 @default.
• W863204525 hasConceptScore W863204525C69990965 @default.
• W863204525 hasConceptScore W863204525C86803240 @default.
• W863204525 hasLocation W8632045251 @default.
• W863204525 hasOpenAccess W863204525 @default.
• W863204525 hasPrimaryLocation W8632045251 @default.
• W863204525 hasRelatedWork W1967043079 @default.
• W863204525 hasRelatedWork W1986118673 @default.
• W863204525 hasRelatedWork W1994293766 @default.
• W863204525 hasRelatedWork W1996857493 @default.
• W863204525 hasRelatedWork W1997360931 @default.
• W863204525 hasRelatedWork W2001875781 @default.
• W863204525 hasRelatedWork W2016850843 @default.
• W863204525 hasRelatedWork W2021865559 @default.
• W863204525 hasRelatedWork W2023756081 @default.
• W863204525 hasRelatedWork W2053819493 @default.
• W863204525 hasRelatedWork W2264718500 @default.
• W863204525 hasRelatedWork W2356203037 @default.

• next