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- W86993463 abstract "The LLNL, Zygo (mod 5500), WYKO (Topo - 2 D, Topo - 3 D), and Photographic Sciences (MP-2000), non contact optical profilers were compared and found consistent within their common band limits." @default.
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- W86993463 date "1988-01-01" @default.
- W86993463 modified "2023-09-27" @default.
- W86993463 title "Some Comparisons of Non Contact Surface Profiling Instruments" @default.
- W86993463 doi "https://doi.org/10.1364/oft.1988.tha1" @default.
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