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- W876431681 abstract "Abstract Al/Al x O y and Ti/TiO x nanoparticles have been fabricated using gas aggregation cluster source (GAS) equipped with 3-inch planar magnetrons. The main attention has been devoted to the evaluation of the role of oxygen admixture on the deposition rate and properties of formed nanoparticles. It has been found that oxidized nanoparticles are deposited when oxygen is present in the working gas mixture. Highest deposition rates for production of Al/Al x O y or Ti/TiO x nanoparticles were observed when 3% or 1.5% oxygen was present in the working gas mixture, respectively. Mean diameters of about 16 nm for the Al x O y nanoparticles and 30 nm for TiO x have been found under these deposition conditions." @default.
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- W876431681 date "2015-10-01" @default.
- W876431681 modified "2023-10-03" @default.
- W876431681 title "Preparation of metal oxide nanoparticles by gas aggregation cluster source" @default.
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- W876431681 doi "https://doi.org/10.1016/j.vacuum.2015.07.008" @default.
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