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- W879790397 abstract "Ga-doped polycrystalline ZnO films on glass substrates were prepared by sputtering the targets, which had been prepared by sintering discs consisting of ZnO powder and various amounts of G, to investigate the effects of gallium doping and sputtering conditions on electrical properties. Optimizing the RF power density, argon gas pressure and gallium content, transparent Ga-doped ZnO films with resistivity less than 1ohm-cm are obtained. Electron concentration of undoped and Ga-doped ZnO films are order of , /crespectively. After heat treatment in air and the resistivity of Ga-doped ZnO films increases by about two orders of magnitude. The optical transmission is above 80% in the visible range and the optical band widens as the Ga content increases." @default.
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- W879790397 date "1992-01-01" @default.
- W879790397 modified "2023-09-26" @default.
- W879790397 title "Properties of Transparent Conducting Zinc Oxide Films Prepared by RF Sputtering" @default.
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