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- W88590585 abstract "AbstractIn Chap. 3, we introduce the basic concept and the general theory of finite element method (FEM) for electrical, thermal, mechanical, and coupled-field multi-physics analysis. EM is a complicated physical and material phenomenon that involves the analysis of electro-thermo-mechanical-coupled field analysis and governed by various partial differential equations. FEM is able to solve the partial differential equation and handle complex geometries (and boundaries) with relative ease. Therefore, several EM studies employ the FEM for more complete investigation on different interconnect structures. In this chapter, we will provide an overview on the application of FEM for EM study.KeywordsHydrostatic StressVoid GrowthVoid NucleationMetal LineSimulation MethodologyThese keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves." @default.
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- W88590585 date "2011-01-01" @default.
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- W88590585 title "Finite Element Method for Electromigration Study" @default.
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- W88590585 doi "https://doi.org/10.1007/978-0-85729-310-7_4" @default.
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