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- W886833658 abstract "The thin films are deposited on Pt-coated electrode(Pt/TiN//Si) using RF sputtering method at various deposition temperature. The crystallinity of SCT thin films were increased with increase of deposition temperature in the temperature range of 100~500[]. Also, the composition of SCT thin films were closed to stoichiometry(1.080~1.111 in A/B ratio). The dielectric constant of SCT thin films were increased with the increase of deposition temperature, and changed almost linearly in temperature ranges of -80~+90[]. Also, SCT thin films was observed the phenomena of dielectric relaxation with the increase of frequency, and the relaxation frequency was observed above 200[KHz]. The current-voltage characteristics of SCT thin films showed the increasing leakage current as the deposition temperature increases." @default.
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- W886833658 date "1999-01-01" @default.
- W886833658 modified "2023-09-27" @default.
- W886833658 title "Microstructure and Electrical Properties of $(Sr_{0.85}Ca_{0.15})TiO_3$ Thin Film with Deposition Temperature" @default.
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